Square-extensional mode single-crystal silicon micromechanical RF-resonator

Ville Kaajakari, Tomi Mattila, Aarne Oja, Jyrki Kiihamäki, Hannu Kattelus, Mika Koskenvuori, Pekka Rantakari, Ilkka Tittonen, Heikki Seppä

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

50 Citations (Scopus)

Abstract

A micromechanical 13.1 MHz bulk acoustic mode (BAW) silicon resonator is demonstrated. The vibration mode can be characterized as a 2-D plate expansion that preserves the original square shape. The prototype resonator is fabricated of single-crystal silicon by reactive ion etching a silicon-on-insulator (SOI) wafer. The measured high quality factor (Q = 130 000) and current output (iMAX~160 A) make the resonator suitable for reference oscillator applications. An electrical equivalent circuit based on physical device parameters is derived and experimentally verified.
Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - The 12th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages951-954
Volume2
ISBN (Print)0-7803-7731-1
DOIs
Publication statusPublished - 2003
MoE publication typeA4 Article in a conference publication
Event12th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers '03 - Boston, United States
Duration: 8 Jun 200312 Jun 2003
Conference number: 12

Conference

Conference12th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers '03
Abbreviated titleTransducers '03
CountryUnited States
CityBoston
Period8/06/0312/06/03

Keywords

  • RF-MEMS
  • resonator
  • SOI

Fingerprint Dive into the research topics of 'Square-extensional mode single-crystal silicon micromechanical RF-resonator'. Together they form a unique fingerprint.

Cite this