Square-extensional mode single-crystal silicon micromechanical RF-resonator

Ville Kaajakari, Tomi Mattila, Aarne Oja, Jyrki Kiihamäki, Hannu Kattelus, Mika Koskenvuori, Pekka Rantakari, Ilkka Tittonen, Heikki Seppä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    50 Citations (Scopus)

    Abstract

    A micromechanical 13.1 MHz bulk acoustic mode (BAW) silicon resonator is demonstrated. The vibration mode can be characterized as a 2-D plate expansion that preserves the original square shape. The prototype resonator is fabricated of single-crystal silicon by reactive ion etching a silicon-on-insulator (SOI) wafer. The measured high quality factor (Q = 130 000) and current output (iMAX~160 A) make the resonator suitable for reference oscillator applications. An electrical equivalent circuit based on physical device parameters is derived and experimentally verified.
    Original languageEnglish
    Title of host publicationTRANSDUCERS 2003 - The 12th International Conference on Solid-State Sensors, Actuators and Microsystems
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages951-954
    Volume2
    ISBN (Print)0-7803-7731-1
    DOIs
    Publication statusPublished - 2003
    MoE publication typeA4 Article in a conference publication
    Event12th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers '03 - Boston, United States
    Duration: 8 Jun 200312 Jun 2003
    Conference number: 12

    Conference

    Conference12th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers '03
    Abbreviated titleTransducers '03
    CountryUnited States
    CityBoston
    Period8/06/0312/06/03

    Keywords

    • RF-MEMS
    • resonator
    • SOI

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