Square-extensional mode single-crystal silicon micromechanical RF-resonator

Ville Kaajakari, Tomi Mattila, Aarne Oja, Jyrki Kiihamäki, Hannu Kattelus, Mika Koskenvuori, Pekka Rantakari, Ilkka Tittonen, Heikki Seppä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    55 Citations (Scopus)

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    Material Science

    Engineering