Square-extensional mode single-crystal silicon micromechanical RF-resonator
- Ville Kaajakari
- , Tomi Mattila
- , Aarne Oja
- , Jyrki Kiihamäki
- , Hannu Kattelus
- , Mika Koskenvuori
- , Pekka Rantakari
- , Ilkka Tittonen
- , Heikki Seppä
- Helsinki University of Technology
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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