Stability and residual stresses of sputtered wurtzite AlScN thin films

Elmeri Österlund (Corresponding Author), Glenn Ross, Miguel A. Caro, Mervi Paulasto-Kröckel, Andreas Hollmann, Manuela Klaus, Matthias Meixner, Christoph Genzel, Panu Koppinen, Tuomas Pensala, Agnė Žukauskaitė, Michal Trebala

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