The stability of three complexing agents, HEDP, CDTA and
DTPMP, in the SC-1 bath was determined. The feasibility
of using capillary electrophoresis (CE) and electrospray
ionization mass spectrometry (ESI/MS) for such studies
was assessed. CE was employed for stability studies and
ESI/MS was used to analyze small complexing agent
concentrations relevant to residue studies. Chem.
residues were studied by secondary ion mass spectrometry.
|Series||Solid State Phenomena|
|Conference||6th International Symposium on the Ultra Clean Processing of Silicon Surfaces, UCPSS 2002|
|Abbreviated title||UCPSS 2002|
|Period||16/09/02 → 18/09/02|
- capillary electrophoresis
- complexing agents
- electrospray ionization mass spectrometry
- secondary-ion mass spectrometry