Abstract
The stability of three complexing agents, HEDP, CDTA and
DTPMP, in the SC-1 bath was determined. The feasibility
of using capillary electrophoresis (CE) and electrospray
ionization mass spectrometry (ESI/MS) for such studies
was assessed. CE was employed for stability studies and
ESI/MS was used to analyze small complexing agent
concentrations relevant to residue studies. Chem.
residues were studied by secondary ion mass spectrometry.
Original language | English |
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Title of host publication | Ultra Clean Processing of Silicon Surfaces VI |
Editors | Marc Heyns, Paul Mertens, Marc Meuris |
Pages | 41-44 |
DOIs | |
Publication status | Published - 2003 |
MoE publication type | A4 Article in a conference publication |
Event | 6th International Symposium on the Ultra Clean Processing of Silicon Surfaces, UCPSS 2002 - Oostende, Belgium Duration: 16 Sept 2002 → 18 Sept 2002 Conference number: 6 |
Publication series
Series | Solid State Phenomena |
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Volume | 92 |
ISSN | 1012-0394 |
Conference
Conference | 6th International Symposium on the Ultra Clean Processing of Silicon Surfaces, UCPSS 2002 |
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Abbreviated title | UCPSS 2002 |
Country/Territory | Belgium |
City | Oostende |
Period | 16/09/02 → 18/09/02 |
Keywords
- capillary electrophoresis
- complexing agents
- decomposition
- electrospray ionization mass spectrometry
- secondary-ion mass spectrometry
- stability