Stability and residue studies on complexing agents in SC-1 bath

Heini Saloniemi, Simo Eränen, Raimo Ketola, Juha Kokkonen, Sari Lehto, Kaija Luomaperä, Pertti Vastamäki, Heli Siren, Olli Anttila

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Original languageEnglish
    Title of host publicationProceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002
    EditorsMarc Heyns, Paul Mertens
    PublisherTrans Tech Publications
    Pages41
    ISBN (Print)978-3908450788
    Publication statusPublished - 2003
    MoE publication typeB3 Non-refereed article in conference proceedings
    Event6th International Symposium on the Ultra Clean Processing of Silicon Surfaces, UCPSS 2002 - Oostende, Belgium
    Duration: 16 Sep 200218 Sep 2002
    Conference number: 6

    Conference

    Conference6th International Symposium on the Ultra Clean Processing of Silicon Surfaces, UCPSS 2002
    Abbreviated titleUCPSS 2002
    CountryBelgium
    CityOostende
    Period16/09/0218/09/02

    Keywords

    • complexing agents
    • SC-1
    • stability

    Cite this

    Saloniemi, H., Eränen, S., Ketola, R., Kokkonen, J., Lehto, S., Luomaperä, K., Vastamäki, P., Siren, H., & Anttila, O. (2003). Stability and residue studies on complexing agents in SC-1 bath. In M. Heyns, & P. Mertens (Eds.), Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002 (pp. 41). Trans Tech Publications.