Stability and residue studies on complexing agents in SC-1 bath

Heini Saloniemi, Simo Eränen, Raimo Ketola, Juha Kokkonen, Sari Lehto, Kaija Luomaperä, Pertti Vastamäki, Heli Siren, Olli Anttila

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publicationProceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002
EditorsMarc Heyns, Paul Mertens
PublisherTrans Tech Publications
Pages41
ISBN (Print)978-3908450788
Publication statusPublished - 2003
MoE publication typeB3 Non-refereed article in conference proceedings
Event6th International Symposium on the Ultra Clean Processing of Silicon Surfaces, UCPSS 2002 - Oostende, Belgium
Duration: 16 Sep 200218 Sep 2002
Conference number: 6

Conference

Conference6th International Symposium on the Ultra Clean Processing of Silicon Surfaces, UCPSS 2002
Abbreviated titleUCPSS 2002
CountryBelgium
CityOostende
Period16/09/0218/09/02

Keywords

  • complexing agents
  • SC-1
  • stability

Cite this

Saloniemi, H., Eränen, S., Ketola, R., Kokkonen, J., Lehto, S., Luomaperä, K., ... Anttila, O. (2003). Stability and residue studies on complexing agents in SC-1 bath. In M. Heyns, & P. Mertens (Eds.), Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002 (pp. 41). Trans Tech Publications.
Saloniemi, Heini ; Eränen, Simo ; Ketola, Raimo ; Kokkonen, Juha ; Lehto, Sari ; Luomaperä, Kaija ; Vastamäki, Pertti ; Siren, Heli ; Anttila, Olli. / Stability and residue studies on complexing agents in SC-1 bath. Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002. editor / Marc Heyns ; Paul Mertens. Trans Tech Publications, 2003. pp. 41
@inproceedings{a99800fe437d4f5288983210d4804fba,
title = "Stability and residue studies on complexing agents in SC-1 bath",
keywords = "complexing agents, SC-1, stability",
author = "Heini Saloniemi and Simo Er{\"a}nen and Raimo Ketola and Juha Kokkonen and Sari Lehto and Kaija Luomaper{\"a} and Pertti Vastam{\"a}ki and Heli Siren and Olli Anttila",
year = "2003",
language = "English",
isbn = "978-3908450788",
pages = "41",
editor = "Marc Heyns and Paul Mertens",
booktitle = "Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002",
publisher = "Trans Tech Publications",
address = "Switzerland",

}

Saloniemi, H, Eränen, S, Ketola, R, Kokkonen, J, Lehto, S, Luomaperä, K, Vastamäki, P, Siren, H & Anttila, O 2003, Stability and residue studies on complexing agents in SC-1 bath. in M Heyns & P Mertens (eds), Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002. Trans Tech Publications, pp. 41, 6th International Symposium on the Ultra Clean Processing of Silicon Surfaces, UCPSS 2002, Oostende, Belgium, 16/09/02.

Stability and residue studies on complexing agents in SC-1 bath. / Saloniemi, Heini; Eränen, Simo; Ketola, Raimo; Kokkonen, Juha; Lehto, Sari; Luomaperä, Kaija; Vastamäki, Pertti; Siren, Heli; Anttila, Olli.

Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002. ed. / Marc Heyns; Paul Mertens. Trans Tech Publications, 2003. p. 41.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

TY - GEN

T1 - Stability and residue studies on complexing agents in SC-1 bath

AU - Saloniemi, Heini

AU - Eränen, Simo

AU - Ketola, Raimo

AU - Kokkonen, Juha

AU - Lehto, Sari

AU - Luomaperä, Kaija

AU - Vastamäki, Pertti

AU - Siren, Heli

AU - Anttila, Olli

PY - 2003

Y1 - 2003

KW - complexing agents

KW - SC-1

KW - stability

M3 - Conference article in proceedings

SN - 978-3908450788

SP - 41

BT - Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002

A2 - Heyns, Marc

A2 - Mertens, Paul

PB - Trans Tech Publications

ER -

Saloniemi H, Eränen S, Ketola R, Kokkonen J, Lehto S, Luomaperä K et al. Stability and residue studies on complexing agents in SC-1 bath. In Heyns M, Mertens P, editors, Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002. Trans Tech Publications. 2003. p. 41