Stability and residue studies on complexing agents in SC-1 bath

Heini Saloniemi; Simo Eränen; Raimo Ketola; Juha Kokkonen; Sari Lehto; Kaija Luomaperä; Pertti Vastamäki; Heli Siren; Olli Anttila

Stability and residue studies on complexing agents in SC-1 bath

Heini Saloniemi, Simo Eränen, Raimo Ketola, Juha Kokkonen, Sari Lehto, Kaija Luomaperä, Pertti Vastamäki, Heli Siren, Olli Anttila

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Original language	English
Title of host publication	Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002
Editors	Marc Heyns, Paul Mertens
Publisher	Trans Tech Publications
Pages	41
ISBN (Print)	978-3908450788
Publication status	Published - 2003
MoE publication type	B3 Non-refereed article in conference proceedings
Event	6th International Symposium on the Ultra Clean Processing of Silicon Surfaces, UCPSS 2002 - Oostende, Belgium Duration: 16 Sept 2002 → 18 Sept 2002 Conference number: 6

Conference

Conference	6th International Symposium on the Ultra Clean Processing of Silicon Surfaces, UCPSS 2002
Abbreviated title	UCPSS 2002
Country/Territory	Belgium
City	Oostende
Period	16/09/02 → 18/09/02

Keywords

complexing agents
SC-1
stability

Cite this

@inproceedings{a99800fe437d4f5288983210d4804fba,

title = "Stability and residue studies on complexing agents in SC-1 bath",

keywords = "complexing agents, SC-1, stability",

author = "Heini Saloniemi and Simo Er{\"a}nen and Raimo Ketola and Juha Kokkonen and Sari Lehto and Kaija Luomaper{\"a} and Pertti Vastam{\"a}ki and Heli Siren and Olli Anttila",

year = "2003",

language = "English",

isbn = "978-3908450788",

pages = "41",

editor = "Marc Heyns and Paul Mertens",

booktitle = "Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002",

publisher = "Trans Tech Publications",

address = "Switzerland",

note = "6th International Symposium on the Ultra Clean Processing of Silicon Surfaces, UCPSS 2002, UCPSS 2002 ; Conference date: 16-09-2002 Through 18-09-2002",

}

Saloniemi, H, Eränen, S, Ketola, R, Kokkonen, J, Lehto, S, Luomaperä, K, Vastamäki, P, Siren, H & Anttila, O 2003, Stability and residue studies on complexing agents in SC-1 bath. in M Heyns & P Mertens (eds), Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002. Trans Tech Publications, pp. 41, 6th International Symposium on the Ultra Clean Processing of Silicon Surfaces, UCPSS 2002, Oostende, Belgium, 16/09/02.

Stability and residue studies on complexing agents in SC-1 bath. / Saloniemi, Heini; Eränen, Simo; Ketola, Raimo et al.
Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002. ed. / Marc Heyns; Paul Mertens. Trans Tech Publications, 2003. p. 41.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

TY - GEN

T1 - Stability and residue studies on complexing agents in SC-1 bath

AU - Saloniemi, Heini

AU - Eränen, Simo

AU - Ketola, Raimo

AU - Kokkonen, Juha

AU - Lehto, Sari

AU - Luomaperä, Kaija

AU - Vastamäki, Pertti

AU - Siren, Heli

AU - Anttila, Olli

N1 - Conference code: 6

PY - 2003

Y1 - 2003

KW - complexing agents

KW - SC-1

KW - stability

M3 - Conference article in proceedings

SN - 978-3908450788

SP - 41

BT - Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002

A2 - Heyns, Marc

A2 - Mertens, Paul

PB - Trans Tech Publications

T2 - 6th International Symposium on the Ultra Clean Processing of Silicon Surfaces, UCPSS 2002

Y2 - 16 September 2002 through 18 September 2002

ER -