Stability of electrostatic actuation of MEMS

Anu Kärkkäinen; Aarne Oja; Jukka Kyynäräinen; Heikki Kuisma; Heikki Seppä

doi:10.1088/0031-8949/2004/T114/048

Stability of electrostatic actuation of MEMS

Anu Kärkkäinen, Aarne Oja, Jukka Kyynäräinen, Heikki Kuisma, Heikki Seppä

Murata Electronics Oy

Research output: Contribution to journal › Article › Scientific › peer-review

19 Citations (Scopus)

Abstract

The increased electrostatic stability of MEMS sensors enables new application areas for the sensors, and decreases the manufacturing costs of existing products. Especially in the applications where the MEMS component is operated under bias voltage close to the pull-in point, the undesired instability phenomenon becomes a major source of inaccuracy. We demonstrate that biasing the sensor to the pull-in point using AC voltage is significantly more stable than the conventionally used DC voltage biasing.

Original language	English
Pages (from-to)	193 - 194
Number of pages	2
Journal	Physica Scripta
Volume	T114
DOIs	https://doi.org/10.1088/0031-8949/2004/T114/048
Publication status	Published - 2004
MoE publication type	A1 Journal article-refereed
Event	20th Nordic Semiconductor Meeting, NSM20 - Tampere, Finland Duration: 25 Aug 2003 → 27 Aug 2003

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10.1088/0031-8949/2004/T114/048

http://lib.tkk.fi/Diss/2006/isbn9513868605/article1.pdf

Cite this

@article{bf2cbbb2ba184557a16d3a689fa6aa0e,

title = "Stability of electrostatic actuation of MEMS",

abstract = "The increased electrostatic stability of MEMS sensors enables new application areas for the sensors, and decreases the manufacturing costs of existing products. Especially in the applications where the MEMS component is operated under bias voltage close to the pull-in point, the undesired instability phenomenon becomes a major source of inaccuracy. We demonstrate that biasing the sensor to the pull-in point using AC voltage is significantly more stable than the conventionally used DC voltage biasing.",

author = "Anu K{\"a}rkk{\"a}inen and Aarne Oja and Jukka Kyyn{\"a}r{\"a}inen and Heikki Kuisma and Heikki Sepp{\"a}",

year = "2004",

doi = "10.1088/0031-8949/2004/T114/048",

language = "English",

volume = "T114",

pages = "193 -- 194",

journal = "Physica Scripta",

issn = "0281-1847",

publisher = "Institute of Physics IOP",

note = "20th Nordic Semiconductor Meeting, NSM20 ; Conference date: 25-08-2003 Through 27-08-2003",

}

TY - JOUR

T1 - Stability of electrostatic actuation of MEMS

AU - Kärkkäinen, Anu

AU - Oja, Aarne

AU - Kyynäräinen, Jukka

AU - Kuisma, Heikki

AU - Seppä, Heikki

PY - 2004

Y1 - 2004

N2 - The increased electrostatic stability of MEMS sensors enables new application areas for the sensors, and decreases the manufacturing costs of existing products. Especially in the applications where the MEMS component is operated under bias voltage close to the pull-in point, the undesired instability phenomenon becomes a major source of inaccuracy. We demonstrate that biasing the sensor to the pull-in point using AC voltage is significantly more stable than the conventionally used DC voltage biasing.

AB - The increased electrostatic stability of MEMS sensors enables new application areas for the sensors, and decreases the manufacturing costs of existing products. Especially in the applications where the MEMS component is operated under bias voltage close to the pull-in point, the undesired instability phenomenon becomes a major source of inaccuracy. We demonstrate that biasing the sensor to the pull-in point using AC voltage is significantly more stable than the conventionally used DC voltage biasing.

U2 - 10.1088/0031-8949/2004/T114/048

DO - 10.1088/0031-8949/2004/T114/048

M3 - Article

SN - 0281-1847

VL - T114

SP - 193

EP - 194

JO - Physica Scripta

JF - Physica Scripta

T2 - 20th Nordic Semiconductor Meeting, NSM20

Y2 - 25 August 2003 through 27 August 2003

ER -

Stability of electrostatic actuation of MEMS

Abstract

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