Stability of electrostatic actuation of MEMS

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)

Abstract

The increased electrostatic stability of MEMS sensors enables new application areas for the sensors, and decreases the manufacturing costs of existing products. Especially in the applications where the MEMS component is operated under bias voltage close to the pull-in point, the undesired instability phenomenon becomes a major source of inaccuracy. We demonstrate that biasing the sensor to the pull-in point using AC voltage is significantly more stable than the conventionally used DC voltage biasing.
Original languageEnglish
Pages (from-to)193 - 194
Number of pages2
JournalPhysica Scripta
VolumeT114
DOIs
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed
Event20th Nordic Semiconductor Meeting, NSM20 - Tampere, Finland
Duration: 25 Aug 200327 Aug 2003

Fingerprint

Micro-electro-mechanical Systems
actuation
Electrostatics
microelectromechanical systems
Voltage
electrostatics
Sensor
sensors
electric potential
alternating current
manufacturing
Manufacturing
direct current
costs
Decrease
Costs
products
Demonstrate

Cite this

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title = "Stability of electrostatic actuation of MEMS",
abstract = "The increased electrostatic stability of MEMS sensors enables new application areas for the sensors, and decreases the manufacturing costs of existing products. Especially in the applications where the MEMS component is operated under bias voltage close to the pull-in point, the undesired instability phenomenon becomes a major source of inaccuracy. We demonstrate that biasing the sensor to the pull-in point using AC voltage is significantly more stable than the conventionally used DC voltage biasing.",
author = "Anu K{\"a}rkk{\"a}inen and Aarne Oja and Jukka Kyyn{\"a}r{\"a}inen and Heikki Kuisma and Heikki Sepp{\"a}",
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volume = "T114",
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journal = "Physica Scripta",
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Stability of electrostatic actuation of MEMS. / Kärkkäinen, Anu; Oja, Aarne; Kyynäräinen, Jukka; Kuisma, Heikki; Seppä, Heikki.

In: Physica Scripta, Vol. T114, 2004, p. 193 - 194.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Stability of electrostatic actuation of MEMS

AU - Kärkkäinen, Anu

AU - Oja, Aarne

AU - Kyynäräinen, Jukka

AU - Kuisma, Heikki

AU - Seppä, Heikki

PY - 2004

Y1 - 2004

N2 - The increased electrostatic stability of MEMS sensors enables new application areas for the sensors, and decreases the manufacturing costs of existing products. Especially in the applications where the MEMS component is operated under bias voltage close to the pull-in point, the undesired instability phenomenon becomes a major source of inaccuracy. We demonstrate that biasing the sensor to the pull-in point using AC voltage is significantly more stable than the conventionally used DC voltage biasing.

AB - The increased electrostatic stability of MEMS sensors enables new application areas for the sensors, and decreases the manufacturing costs of existing products. Especially in the applications where the MEMS component is operated under bias voltage close to the pull-in point, the undesired instability phenomenon becomes a major source of inaccuracy. We demonstrate that biasing the sensor to the pull-in point using AC voltage is significantly more stable than the conventionally used DC voltage biasing.

U2 - 10.1088/0031-8949/2004/T114/048

DO - 10.1088/0031-8949/2004/T114/048

M3 - Article

VL - T114

SP - 193

EP - 194

JO - Physica Scripta

JF - Physica Scripta

SN - 0031-8949

ER -