Stability of electrostatic actuation of MEMS

    Research output: Contribution to journalArticleScientificpeer-review

    12 Citations (Scopus)

    Abstract

    The increased electrostatic stability of MEMS sensors enables new application areas for the sensors, and decreases the manufacturing costs of existing products. Especially in the applications where the MEMS component is operated under bias voltage close to the pull-in point, the undesired instability phenomenon becomes a major source of inaccuracy. We demonstrate that biasing the sensor to the pull-in point using AC voltage is significantly more stable than the conventionally used DC voltage biasing.
    Original languageEnglish
    Pages (from-to)193 - 194
    Number of pages2
    JournalPhysica Scripta
    VolumeT114
    DOIs
    Publication statusPublished - 2004
    MoE publication typeA1 Journal article-refereed
    Event20th Nordic Semiconductor Meeting, NSM20 - Tampere, Finland
    Duration: 25 Aug 200327 Aug 2003

    Fingerprint

    Micro-electro-mechanical Systems
    actuation
    Electrostatics
    microelectromechanical systems
    Voltage
    electrostatics
    Sensor
    sensors
    electric potential
    alternating current
    manufacturing
    Manufacturing
    direct current
    costs
    Decrease
    Costs
    products
    Demonstrate

    Cite this

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    title = "Stability of electrostatic actuation of MEMS",
    abstract = "The increased electrostatic stability of MEMS sensors enables new application areas for the sensors, and decreases the manufacturing costs of existing products. Especially in the applications where the MEMS component is operated under bias voltage close to the pull-in point, the undesired instability phenomenon becomes a major source of inaccuracy. We demonstrate that biasing the sensor to the pull-in point using AC voltage is significantly more stable than the conventionally used DC voltage biasing.",
    author = "Anu K{\"a}rkk{\"a}inen and Aarne Oja and Jukka Kyyn{\"a}r{\"a}inen and Heikki Kuisma and Heikki Sepp{\"a}",
    year = "2004",
    doi = "10.1088/0031-8949/2004/T114/048",
    language = "English",
    volume = "T114",
    pages = "193 -- 194",
    journal = "Physica Scripta",
    issn = "0031-8949",
    publisher = "Institute of Physics IOP",

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    Stability of electrostatic actuation of MEMS. / Kärkkäinen, Anu; Oja, Aarne; Kyynäräinen, Jukka; Kuisma, Heikki; Seppä, Heikki.

    In: Physica Scripta, Vol. T114, 2004, p. 193 - 194.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Stability of electrostatic actuation of MEMS

    AU - Kärkkäinen, Anu

    AU - Oja, Aarne

    AU - Kyynäräinen, Jukka

    AU - Kuisma, Heikki

    AU - Seppä, Heikki

    PY - 2004

    Y1 - 2004

    N2 - The increased electrostatic stability of MEMS sensors enables new application areas for the sensors, and decreases the manufacturing costs of existing products. Especially in the applications where the MEMS component is operated under bias voltage close to the pull-in point, the undesired instability phenomenon becomes a major source of inaccuracy. We demonstrate that biasing the sensor to the pull-in point using AC voltage is significantly more stable than the conventionally used DC voltage biasing.

    AB - The increased electrostatic stability of MEMS sensors enables new application areas for the sensors, and decreases the manufacturing costs of existing products. Especially in the applications where the MEMS component is operated under bias voltage close to the pull-in point, the undesired instability phenomenon becomes a major source of inaccuracy. We demonstrate that biasing the sensor to the pull-in point using AC voltage is significantly more stable than the conventionally used DC voltage biasing.

    U2 - 10.1088/0031-8949/2004/T114/048

    DO - 10.1088/0031-8949/2004/T114/048

    M3 - Article

    VL - T114

    SP - 193

    EP - 194

    JO - Physica Scripta

    JF - Physica Scripta

    SN - 0031-8949

    ER -