Stability of microelectromechanical devices for electrical metrology

    Research output: Contribution to journalArticleScientificpeer-review

    18 Citations (Scopus)

    Abstract

    Microelectromechanical systems (MEMS) have been recently proposed for realizing several references in electrical metrology. Such devices are formed from micromachined electrodes of which at least one is supported by a compliant structure such that an electrostatic force between two electrodes displaces the moving electrode. The properties of these electromechanical devices can be very stable if they are fabricated from single-crystalline silicon and sealed hermetically in a low-pressure atmosphere. In comparison to several semiconducting reference devices, micromechanical components are large in size and consume a negligible power. Thus, a low 1/f noise level is expected. The proposed MEMS electrical references include a DC and an AC voltage reference, an AC/DC converter, a low-frequency voltage divider, a microwave and millimeter-wave detector, a DC current reference, etc. Measurements on a prototype for a MEMS DC reference are discussed. The stability is presently limited by charge fluctuations on the native oxides of electrode surfaces. Preliminary results show relative fluctuations below 1 /spl mu/V/V.
    Original languageEnglish
    Pages (from-to)1499-1503
    Number of pages5
    JournalIEEE Transactions on Instrumentation and Measurement
    Volume50
    Issue number6
    DOIs
    Publication statusPublished - 2001
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Microelectromechanical devices
    metrology
    MEMS
    Electrodes
    direct current
    microelectromechanical systems
    electrodes
    Electromechanical devices
    Voltage dividers
    Electrostatic force
    alternating current
    Millimeter waves
    electromechanical devices
    dividers
    Microwaves
    electric potential
    Crystalline materials
    Detectors
    Silicon
    millimeter waves

    Cite this

    @article{ec221c0ceabd4847bc8f0ad7fcb4f502,
    title = "Stability of microelectromechanical devices for electrical metrology",
    abstract = "Microelectromechanical systems (MEMS) have been recently proposed for realizing several references in electrical metrology. Such devices are formed from micromachined electrodes of which at least one is supported by a compliant structure such that an electrostatic force between two electrodes displaces the moving electrode. The properties of these electromechanical devices can be very stable if they are fabricated from single-crystalline silicon and sealed hermetically in a low-pressure atmosphere. In comparison to several semiconducting reference devices, micromechanical components are large in size and consume a negligible power. Thus, a low 1/f noise level is expected. The proposed MEMS electrical references include a DC and an AC voltage reference, an AC/DC converter, a low-frequency voltage divider, a microwave and millimeter-wave detector, a DC current reference, etc. Measurements on a prototype for a MEMS DC reference are discussed. The stability is presently limited by charge fluctuations on the native oxides of electrode surfaces. Preliminary results show relative fluctuations below 1 /spl mu/V/V.",
    author = "Jukka Kyyn{\"a}r{\"a}inen and Aarne Oja and Heikki Sepp{\"a}",
    year = "2001",
    doi = "10.1109/19.982934",
    language = "English",
    volume = "50",
    pages = "1499--1503",
    journal = "IEEE Transactions on Instrumentation and Measurement",
    issn = "0018-9456",
    publisher = "IEEE Institute of Electrical and Electronic Engineers",
    number = "6",

    }

    Stability of microelectromechanical devices for electrical metrology. / Kyynäräinen, Jukka; Oja, Aarne; Seppä, Heikki.

    In: IEEE Transactions on Instrumentation and Measurement, Vol. 50, No. 6, 2001, p. 1499-1503.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Stability of microelectromechanical devices for electrical metrology

    AU - Kyynäräinen, Jukka

    AU - Oja, Aarne

    AU - Seppä, Heikki

    PY - 2001

    Y1 - 2001

    N2 - Microelectromechanical systems (MEMS) have been recently proposed for realizing several references in electrical metrology. Such devices are formed from micromachined electrodes of which at least one is supported by a compliant structure such that an electrostatic force between two electrodes displaces the moving electrode. The properties of these electromechanical devices can be very stable if they are fabricated from single-crystalline silicon and sealed hermetically in a low-pressure atmosphere. In comparison to several semiconducting reference devices, micromechanical components are large in size and consume a negligible power. Thus, a low 1/f noise level is expected. The proposed MEMS electrical references include a DC and an AC voltage reference, an AC/DC converter, a low-frequency voltage divider, a microwave and millimeter-wave detector, a DC current reference, etc. Measurements on a prototype for a MEMS DC reference are discussed. The stability is presently limited by charge fluctuations on the native oxides of electrode surfaces. Preliminary results show relative fluctuations below 1 /spl mu/V/V.

    AB - Microelectromechanical systems (MEMS) have been recently proposed for realizing several references in electrical metrology. Such devices are formed from micromachined electrodes of which at least one is supported by a compliant structure such that an electrostatic force between two electrodes displaces the moving electrode. The properties of these electromechanical devices can be very stable if they are fabricated from single-crystalline silicon and sealed hermetically in a low-pressure atmosphere. In comparison to several semiconducting reference devices, micromechanical components are large in size and consume a negligible power. Thus, a low 1/f noise level is expected. The proposed MEMS electrical references include a DC and an AC voltage reference, an AC/DC converter, a low-frequency voltage divider, a microwave and millimeter-wave detector, a DC current reference, etc. Measurements on a prototype for a MEMS DC reference are discussed. The stability is presently limited by charge fluctuations on the native oxides of electrode surfaces. Preliminary results show relative fluctuations below 1 /spl mu/V/V.

    U2 - 10.1109/19.982934

    DO - 10.1109/19.982934

    M3 - Article

    VL - 50

    SP - 1499

    EP - 1503

    JO - IEEE Transactions on Instrumentation and Measurement

    JF - IEEE Transactions on Instrumentation and Measurement

    SN - 0018-9456

    IS - 6

    ER -