Stability of microelectromechanical devices for electrical metrology

Jukka Kyynäräinen, Aarne Oja, Heikki Seppä

    Research output: Contribution to journalArticleScientificpeer-review

    18 Citations (Scopus)


    Microelectromechanical systems (MEMS) have been recently proposed for realizing several references in electrical metrology. Such devices are formed from micromachined electrodes of which at least one is supported by a compliant structure such that an electrostatic force between two electrodes displaces the moving electrode. The properties of these electromechanical devices can be very stable if they are fabricated from single-crystalline silicon and sealed hermetically in a low-pressure atmosphere. In comparison to several semiconducting reference devices, micromechanical components are large in size and consume a negligible power. Thus, a low 1/f noise level is expected. The proposed MEMS electrical references include a DC and an AC voltage reference, an AC/DC converter, a low-frequency voltage divider, a microwave and millimeter-wave detector, a DC current reference, etc. Measurements on a prototype for a MEMS DC reference are discussed. The stability is presently limited by charge fluctuations on the native oxides of electrode surfaces. Preliminary results show relative fluctuations below 1 /spl mu/V/V.
    Original languageEnglish
    Pages (from-to)1499-1503
    Number of pages5
    JournalIEEE Transactions on Instrumentation and Measurement
    Issue number6
    Publication statusPublished - 2001
    MoE publication typeA1 Journal article-refereed


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