Stability of microelectromechanical devices for electrical metrology

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18 Citations (Scopus)

Abstract

Microelectromechanical systems (MEMS) have been recently proposed for realizing several references in electrical metrology. Such devices are formed from micromachined electrodes of which at least one is supported by a compliant structure such that an electrostatic force between two electrodes displaces the moving electrode. The properties of these electromechanical devices can be very stable if they are fabricated from single-crystalline silicon and sealed hermetically in a low-pressure atmosphere. In comparison to several semiconducting reference devices, micromechanical components are large in size and consume a negligible power. Thus, a low 1/f noise level is expected. The proposed MEMS electrical references include a DC and an AC voltage reference, an AC/DC converter, a low-frequency voltage divider, a microwave and millimeter-wave detector, a DC current reference, etc. Measurements on a prototype for a MEMS DC reference are discussed. The stability is presently limited by charge fluctuations on the native oxides of electrode surfaces. Preliminary results show relative fluctuations below 1 /spl mu/V/V.
Original languageEnglish
Pages (from-to)1499-1503
Number of pages5
JournalIEEE Transactions on Instrumentation and Measurement
Volume50
Issue number6
DOIs
Publication statusPublished - 2001
MoE publication typeA1 Journal article-refereed

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Microelectromechanical devices
metrology
MEMS
Electrodes
direct current
microelectromechanical systems
electrodes
Electromechanical devices
Voltage dividers
Electrostatic force
alternating current
Millimeter waves
electromechanical devices
dividers
Microwaves
electric potential
Crystalline materials
Detectors
Silicon
millimeter waves

Cite this

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title = "Stability of microelectromechanical devices for electrical metrology",
abstract = "Microelectromechanical systems (MEMS) have been recently proposed for realizing several references in electrical metrology. Such devices are formed from micromachined electrodes of which at least one is supported by a compliant structure such that an electrostatic force between two electrodes displaces the moving electrode. The properties of these electromechanical devices can be very stable if they are fabricated from single-crystalline silicon and sealed hermetically in a low-pressure atmosphere. In comparison to several semiconducting reference devices, micromechanical components are large in size and consume a negligible power. Thus, a low 1/f noise level is expected. The proposed MEMS electrical references include a DC and an AC voltage reference, an AC/DC converter, a low-frequency voltage divider, a microwave and millimeter-wave detector, a DC current reference, etc. Measurements on a prototype for a MEMS DC reference are discussed. The stability is presently limited by charge fluctuations on the native oxides of electrode surfaces. Preliminary results show relative fluctuations below 1 /spl mu/V/V.",
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Stability of microelectromechanical devices for electrical metrology. / Kyynäräinen, Jukka; Oja, Aarne; Seppä, Heikki.

In: IEEE Transactions on Instrumentation and Measurement, Vol. 50, No. 6, 2001, p. 1499-1503.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Stability of microelectromechanical devices for electrical metrology

AU - Kyynäräinen, Jukka

AU - Oja, Aarne

AU - Seppä, Heikki

PY - 2001

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N2 - Microelectromechanical systems (MEMS) have been recently proposed for realizing several references in electrical metrology. Such devices are formed from micromachined electrodes of which at least one is supported by a compliant structure such that an electrostatic force between two electrodes displaces the moving electrode. The properties of these electromechanical devices can be very stable if they are fabricated from single-crystalline silicon and sealed hermetically in a low-pressure atmosphere. In comparison to several semiconducting reference devices, micromechanical components are large in size and consume a negligible power. Thus, a low 1/f noise level is expected. The proposed MEMS electrical references include a DC and an AC voltage reference, an AC/DC converter, a low-frequency voltage divider, a microwave and millimeter-wave detector, a DC current reference, etc. Measurements on a prototype for a MEMS DC reference are discussed. The stability is presently limited by charge fluctuations on the native oxides of electrode surfaces. Preliminary results show relative fluctuations below 1 /spl mu/V/V.

AB - Microelectromechanical systems (MEMS) have been recently proposed for realizing several references in electrical metrology. Such devices are formed from micromachined electrodes of which at least one is supported by a compliant structure such that an electrostatic force between two electrodes displaces the moving electrode. The properties of these electromechanical devices can be very stable if they are fabricated from single-crystalline silicon and sealed hermetically in a low-pressure atmosphere. In comparison to several semiconducting reference devices, micromechanical components are large in size and consume a negligible power. Thus, a low 1/f noise level is expected. The proposed MEMS electrical references include a DC and an AC voltage reference, an AC/DC converter, a low-frequency voltage divider, a microwave and millimeter-wave detector, a DC current reference, etc. Measurements on a prototype for a MEMS DC reference are discussed. The stability is presently limited by charge fluctuations on the native oxides of electrode surfaces. Preliminary results show relative fluctuations below 1 /spl mu/V/V.

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