Stability of wafer level vacuum encapsulated single-crystal silicon resonators

Ville Kaajakari, Jyrki Kiihamäki, Aarne Oja, Heikki Seppä, Sami Pietikäinen, Ville Kokkala, Heikki Kuisma

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

22 Citations (Scopus)
Original languageEnglish
Title of host publicationThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages916-919
ISBN (Electronic)0-7803-8995-6
ISBN (Print)0-7803-8994-8
DOIs
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
EventThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 5 Jun 20059 Jun 2005

Conference

ConferenceThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05
Abbreviated titleTRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period5/06/059/06/05

Cite this

Kaajakari, V., Kiihamäki, J., Oja, A., Seppä, H., Pietikäinen, S., Kokkala, V., & Kuisma, H. (2005). Stability of wafer level vacuum encapsulated single-crystal silicon resonators. In The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05 (pp. 916-919). IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/SENSOR.2005.1496567