Stability of wafer level vacuum encapsulated single-crystal silicon resonators

Ville Kaajakari; Jyrki Kiihamäki; Aarne Oja; Heikki Seppä; Sami Pietikäinen; Ville Kokkala; Heikki Kuisma

doi:10.1109/SENSOR.2005.1496567

Stability of wafer level vacuum encapsulated single-crystal silicon resonators

Ville Kaajakari, Jyrki Kiihamäki, Aarne Oja, Heikki Seppä, Sami Pietikäinen, Ville Kokkala, Heikki Kuisma

VTT Technical Research Centre of Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

24 Citations (Scopus)

Original language	English
Title of host publication	The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	916-919
ISBN (Electronic)	0-7803-8995-6
ISBN (Print)	0-7803-8994-8
DOIs	https://doi.org/10.1109/SENSOR.2005.1496567
Publication status	Published - 2005
MoE publication type	A4 Article in a conference publication
Event	13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 5 Jun 2005 → 9 Jun 2005

Conference

Conference	13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05
Abbreviated title	TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	5/06/05 → 9/06/05

Access to Document

10.1109/SENSOR.2005.1496567

Cite this

Kaajakari, V., Kiihamäki, J., Oja, A., Seppä, H., Pietikäinen, S., Kokkala, V., & Kuisma, H. (2005). Stability of wafer level vacuum encapsulated single-crystal silicon resonators. In The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05 (pp. 916-919). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/SENSOR.2005.1496567

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title = "Stability of wafer level vacuum encapsulated single-crystal silicon resonators",

author = "Ville Kaajakari and Jyrki Kiiham{\"a}ki and Aarne Oja and Heikki Sepp{\"a} and Sami Pietik{\"a}inen and Ville Kokkala and Heikki Kuisma",

year = "2005",

doi = "10.1109/SENSOR.2005.1496567",

language = "English",

isbn = "0-7803-8994-8",

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booktitle = "The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",

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Kaajakari, V, Kiihamäki, J, Oja, A, Seppä, H, Pietikäinen, S, Kokkala, V & Kuisma, H 2005, Stability of wafer level vacuum encapsulated single-crystal silicon resonators. in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05. IEEE Institute of Electrical and Electronic Engineers, pp. 916-919, 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 5/06/05. https://doi.org/10.1109/SENSOR.2005.1496567

Stability of wafer level vacuum encapsulated single-crystal silicon resonators. / Kaajakari, Ville; Kiihamäki, Jyrki; Oja, Aarne et al.
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05. IEEE Institute of Electrical and Electronic Engineers, 2005. p. 916-919.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Stability of wafer level vacuum encapsulated single-crystal silicon resonators

AU - Kaajakari, Ville

AU - Kiihamäki, Jyrki

AU - Oja, Aarne

AU - Seppä, Heikki

AU - Pietikäinen, Sami

AU - Kokkala, Ville

AU - Kuisma, Heikki

PY - 2005

Y1 - 2005

U2 - 10.1109/SENSOR.2005.1496567

DO - 10.1109/SENSOR.2005.1496567

M3 - Conference article in proceedings

SN - 0-7803-8994-8

SP - 916

EP - 919

BT - The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05

Y2 - 5 June 2005 through 9 June 2005

ER -