@inproceedings{7d0a9783979a42dead9a3a7bebc5ef8e,
title = "Stability of wafer level vacuum encapsulated single-crystal silicon resonators",
author = "Ville Kaajakari and Jyrki Kiiham{\"a}ki and Aarne Oja and Heikki Sepp{\"a} and Sami Pietik{\"a}inen and Ville Kokkala and Heikki Kuisma",
year = "2005",
doi = "10.1109/SENSOR.2005.1496567",
language = "English",
isbn = "0-7803-8994-8",
pages = "916--919",
booktitle = "The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
address = "United States",
note = "13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",
}