Stability of wafer level vacuum encapsulated single-crystal silicon resonators

Ville Kaajakari (Corresponding Author), Jyrki Kiihamäki, Aarne Oja, Sami Pietikäinen, Ville Kokkala, Heikki Kuisma

    Research output: Contribution to journal › Article › Scientific › peer-review

    21 Citations (Scopus)

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    Physics