Stable SOI micromachined electrostatic AC voltage reference

Anu Kärkkäinen (Corresponding Author), Panu Pekko, James Dekker, Nadine Pesonen, Mika Suhonen, Aarne Oja, Jukka Kyynäräinen, Heikki Seppä

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Abstract

We have designed and manufactured a micromachined moving plate capacitor to be used as an AC voltage reference in electrical metrology. The reference is based on the characteristic AC current–voltage curve of the component having a maximum, the value of which ideally depends only on the geometry of the component and material properties of single crystalline silicon. The electrode surface stability is essential in this application and hence a new fabrication process has been developed to metallize both surfaces of an electrostatically actuated micromachined structure. The stability of the AC reference voltage at a frequency of 100 kHz and an RMS voltage value 6.4 V was measured to be ±60 ppm over 14 h.
Original languageEnglish
Pages (from-to)169 - 172
Number of pages4
JournalMicrosystem Technologies
Volume12
Issue number1-2
DOIs
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

Fingerprint

SOI (semiconductors)
Electrostatics
alternating current
electrostatics
Electric potential
electric potential
surface stability
Silicon
metrology
Materials properties
capacitors
Capacitors
Crystalline materials
Fabrication
Electrodes
fabrication
electrodes
Geometry
silicon
curves

Keywords

  • metrology
  • capacitors
  • SOI

Cite this

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title = "Stable SOI micromachined electrostatic AC voltage reference",
abstract = "We have designed and manufactured a micromachined moving plate capacitor to be used as an AC voltage reference in electrical metrology. The reference is based on the characteristic AC current–voltage curve of the component having a maximum, the value of which ideally depends only on the geometry of the component and material properties of single crystalline silicon. The electrode surface stability is essential in this application and hence a new fabrication process has been developed to metallize both surfaces of an electrostatically actuated micromachined structure. The stability of the AC reference voltage at a frequency of 100 kHz and an RMS voltage value 6.4 V was measured to be ±60 ppm over 14 h.",
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Stable SOI micromachined electrostatic AC voltage reference. / Kärkkäinen, Anu (Corresponding Author); Pekko, Panu; Dekker, James; Pesonen, Nadine; Suhonen, Mika; Oja, Aarne; Kyynäräinen, Jukka; Seppä, Heikki.

In: Microsystem Technologies, Vol. 12, No. 1-2, 2005, p. 169 - 172.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Stable SOI micromachined electrostatic AC voltage reference

AU - Kärkkäinen, Anu

AU - Pekko, Panu

AU - Dekker, James

AU - Pesonen, Nadine

AU - Suhonen, Mika

AU - Oja, Aarne

AU - Kyynäräinen, Jukka

AU - Seppä, Heikki

PY - 2005

Y1 - 2005

N2 - We have designed and manufactured a micromachined moving plate capacitor to be used as an AC voltage reference in electrical metrology. The reference is based on the characteristic AC current–voltage curve of the component having a maximum, the value of which ideally depends only on the geometry of the component and material properties of single crystalline silicon. The electrode surface stability is essential in this application and hence a new fabrication process has been developed to metallize both surfaces of an electrostatically actuated micromachined structure. The stability of the AC reference voltage at a frequency of 100 kHz and an RMS voltage value 6.4 V was measured to be ±60 ppm over 14 h.

AB - We have designed and manufactured a micromachined moving plate capacitor to be used as an AC voltage reference in electrical metrology. The reference is based on the characteristic AC current–voltage curve of the component having a maximum, the value of which ideally depends only on the geometry of the component and material properties of single crystalline silicon. The electrode surface stability is essential in this application and hence a new fabrication process has been developed to metallize both surfaces of an electrostatically actuated micromachined structure. The stability of the AC reference voltage at a frequency of 100 kHz and an RMS voltage value 6.4 V was measured to be ±60 ppm over 14 h.

KW - metrology

KW - capacitors

KW - SOI

U2 - 10.1007/s00542-005-0005-y

DO - 10.1007/s00542-005-0005-y

M3 - Article

VL - 12

SP - 169

EP - 172

JO - Microsystem Technologies

JF - Microsystem Technologies

SN - 0946-7076

IS - 1-2

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