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Stamp fabrication by step and stamp nanoimprinting: Dissertation
Tomi Haatainen
Research output
:
Thesis
›
Dissertation
›
Collection of Articles
1
Citation (Scopus)
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Material Science
Polymer
100%
Silicon
100%
Patterning
80%
Nanoimprint Lithography
60%
Metal
60%
Optical Device
40%
Lithography
20%
Pattern Transfer
20%
Electroplating
20%
Mechanical Deformation
20%
Electron Optical Lithography
20%
Material
20%
Embossing
20%
Nickel
20%
Liquid Films
20%