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Stamp fabrication by step and stamp nanoimprinting: Dissertation
Tomi Haatainen
Research output
:
Thesis
›
Dissertation
›
Collection of Articles
2
Citations (Scopus)
Overview
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Dive into the research topics of 'Stamp fabrication by step and stamp nanoimprinting: Dissertation'. Together they form a unique fingerprint.
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INIS
fabrication
100%
molds
100%
polymers
83%
silicon
83%
applications
50%
metals
50%
resist
33%
cost
16%
devices
16%
deformation
16%
lifts
16%
films
16%
availability
16%
dimensions
16%
nickel
16%
electron beams
16%
electroplating
16%
Material Science
Silicon
100%
Lithography
80%
Optical Device
40%
Electroplating
20%
Mechanical Deformation
20%
Film
20%
Keyphrases
Fabricated Metal
6%