Stamp replication by Step & Stamp Imprint Lithography

Research output: Contribution to conferenceOther conference contributionScientific

Original languageEnglish
Publication statusPublished - 2006
MoE publication typeNot Eligible
Event32nd International Conference on Micro- and Nano- Engineering, MNE 2006 - Barcelona, Spain
Duration: 17 Sep 200620 Sep 2006

Conference

Conference32nd International Conference on Micro- and Nano- Engineering, MNE 2006
CountrySpain
CityBarcelona
Period17/09/0620/09/06

Cite this

Haatainen, T., Majander, P., Mäkelä, T., & Ahopelto, J. (2006). Stamp replication by Step & Stamp Imprint Lithography. 32nd International Conference on Micro- and Nano- Engineering, MNE 2006, Barcelona, Spain.
Haatainen, Tomi ; Majander, Päivi ; Mäkelä, Tapio ; Ahopelto, Jouni. / Stamp replication by Step & Stamp Imprint Lithography. 32nd International Conference on Micro- and Nano- Engineering, MNE 2006, Barcelona, Spain.
@conference{dc71c5cd2d18426fa415bf0db2ca2791,
title = "Stamp replication by Step & Stamp Imprint Lithography",
author = "Tomi Haatainen and P{\"a}ivi Majander and Tapio M{\"a}kel{\"a} and Jouni Ahopelto",
year = "2006",
language = "English",
note = "32nd International Conference on Micro- and Nano- Engineering, MNE 2006 ; Conference date: 17-09-2006 Through 20-09-2006",

}

Haatainen, T, Majander, P, Mäkelä, T & Ahopelto, J 2006, 'Stamp replication by Step & Stamp Imprint Lithography', 32nd International Conference on Micro- and Nano- Engineering, MNE 2006, Barcelona, Spain, 17/09/06 - 20/09/06.

Stamp replication by Step & Stamp Imprint Lithography. / Haatainen, Tomi; Majander, Päivi; Mäkelä, Tapio; Ahopelto, Jouni.

2006. 32nd International Conference on Micro- and Nano- Engineering, MNE 2006, Barcelona, Spain.

Research output: Contribution to conferenceOther conference contributionScientific

TY - CONF

T1 - Stamp replication by Step & Stamp Imprint Lithography

AU - Haatainen, Tomi

AU - Majander, Päivi

AU - Mäkelä, Tapio

AU - Ahopelto, Jouni

PY - 2006

Y1 - 2006

M3 - Other conference contribution

ER -

Haatainen T, Majander P, Mäkelä T, Ahopelto J. Stamp replication by Step & Stamp Imprint Lithography. 2006. 32nd International Conference on Micro- and Nano- Engineering, MNE 2006, Barcelona, Spain.