Stamp replication by Step & Stamp Imprint Lithography

Research output: Contribution to conferenceOther conference contributionScientific

Original languageEnglish
Publication statusPublished - 2006
MoE publication typeNot Eligible
Event32nd International Conference on Micro- and Nano- Engineering, MNE 2006 - Barcelona, Spain
Duration: 17 Sep 200620 Sep 2006

Conference

Conference32nd International Conference on Micro- and Nano- Engineering, MNE 2006
CountrySpain
CityBarcelona
Period17/09/0620/09/06

Cite this

Haatainen, T., Majander, P., Mäkelä, T., & Ahopelto, J. (2006). Stamp replication by Step & Stamp Imprint Lithography. 32nd International Conference on Micro- and Nano- Engineering, MNE 2006, Barcelona, Spain.