Stamp replication by Step & Stamp Imprint Lithography

Research output: Contribution to conference › Other conference contribution › Scientific

Original language	English
Publication status	Published - 2006
MoE publication type	Not Eligible
Event	32nd International Conference on Micro- and Nano- Engineering, MNE 2006 - Barcelona, Spain Duration: 17 Sept 2006 → 20 Sept 2006

Conference	32nd International Conference on Micro- and Nano- Engineering, MNE 2006
Country/Territory	Spain
City	Barcelona
Period	17/09/06 → 20/09/06

Cite this

@conference{dc71c5cd2d18426fa415bf0db2ca2791,

title = "Stamp replication by Step \& Stamp Imprint Lithography",

author = "Tomi Haatainen and P{\"a}ivi Majander and Tapio M{\"a}kel{\"a} and Jouni Ahopelto",

year = "2006",

language = "English",

note = "32nd International Conference on Micro- and Nano- Engineering, MNE 2006 ; Conference date: 17-09-2006 Through 20-09-2006",

}