Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometer

Jeremias Seppä, Ivan Kassamakov, Anton Nolvi, Ville Heikkinen, Tor Paulin, Antti Lassila, Ling Hao, Edward Hæggsröm

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Abstract

A scanning white light interferometer can characterize out of plane features and motion in M(N)EMS devices. Like any other form and displacement measuring instrument, the scanning interferometer results should be linked to the metre definition to be comparable and unambiguous. Traceability is built up by careful error characterization and calibration of the interferometer. The main challenge in this calibration is to have a reference device producing accurate and reproducible dynamic out-of-plane displacement when submitted to standard loads. We use a flat mirror attached to a piezoelectric transducer for static and (quasi)dynamic calibration of a stroboscopic scanning light interferometer. First we calibrated the piezo-scanned flexure guided transducer stage using a symmetric differential heterodyne laser interferometer developed at the Centre for Metrology and Accreditation (MIKES). The standard uncertainty of the piezo stage motion calibration was 3.0 nm. Then we used the piezo-stage as a transfer standard to calibrate our stroboscopic interferometer whose light source was pulsed at 200 Hz and 400 Hz with 0.5% duty cycle. We measured the static position and (quasi)dynamic motion of the attached mirror relative to a reference surface. This methodology permits calibrating the vertical scale of the stroboscopic scanning white light interferometer.

Original languageEnglish
Title of host publicationOptical Measurement Systems for Industrial Inspection VIII
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-0-8194-9604-1
DOIs
Publication statusPublished - 1 Aug 2013
MoE publication typeNot Eligible
EventOptical Measurement Systems for Industrial Inspection VIII - Munich, Germany
Duration: 13 May 201316 May 2013

Publication series

SeriesProceedings of SPIE
Volume8788
ISSN0277-786X

Conference

ConferenceOptical Measurement Systems for Industrial Inspection VIII
CountryGermany
CityMunich
Period13/05/1316/05/13

Keywords

  • MEMS
  • NEMS
  • Scanning White Light Interferomety
  • Stroboscopic

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