Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometer

Keyphrases

• Scanning White Light Interferometer 100%
• Dynamic Calibration 100%
• Interferometer 100%
• Quasi-dynamic 100%
• Piezo-actuated Stage 66%
• Transfer Standard 33%
• MIKES 33%
• Metrology 33%
• Reference Surface 33%
• Measuring Instrument 33%
• Light Source 33%
• Dynamic Motion 33%
• Accreditation 33%
• Heterodyne Laser Interferometer 33%
• Vertical Scaling 33%
• Symmetric Differentials 33%
• Reference Instrument 33%
• Duty Cycle 33%
• Error Characterization 33%
• Piezo 33%
• Flexure 33%
• Error Calibration 33%
• Piezoelectric Transducer 33%
• Flat Mirror 33%
• Out-of-plane Displacement 33%
• Static Position 33%
• Scanning Interferometer 33%
• Plane Motion 33%
• Plane Feature 33%
• Displacement Measuring 33%

Engineering

• Transducer 100%
• Traceability 50%
• Duty Cycle 50%
• Piezoelectric 50%
• Accreditation 50%
• Producing Device 50%
• Laser Interferometer 50%
• Reference Surface 50%
• Dynamic Motion 50%
• Flexure 50%
• Light Source 50%

INIS

• dynamics 100%
• calibration 100%
• interferometers 100%
• motion 37%
• devices 25%
• transducers 25%
• surfaces 12%
• errors 12%
• lasers 12%
• metrology 12%
• symmetry 12%
• meters 12%
• measuring instruments 12%
• light sources 12%
• mirrors 12%
• piezoelectricity 12%
• flat mirrors 12%