Status of the process to produce large area double-sided silicon detectors

Simo Eränen, Teija Häkkinen, Kari Leinonen, I. Hietanen, C. Rönnqvist, T. Schulman, T. Tuuva, M. Voutilainen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publicationProceedings of the 15th Nordic Semiconductor Meeting
EditorsSami Franssila, Riitta Paananen
Place of PublicationEspoo
PublisherVTT Technical Research Centre of Finland
Pages247-250
ISBN (Print)951-47-6261-4
Publication statusPublished - 1992
MoE publication typeB3 Non-refereed article in conference proceedings
Event15th Nordic Semiconductor Meeting - Hämeenlinna, Finland
Duration: 9 Jun 199211 Jun 1992
Conference number: 15

Conference

Conference15th Nordic Semiconductor Meeting
CountryFinland
CityHämeenlinna
Period9/06/9211/06/92

Cite this

Eränen, S., Häkkinen, T., Leinonen, K., Hietanen, I., Rönnqvist, C., Schulman, T., Tuuva, T., & Voutilainen, M. (1992). Status of the process to produce large area double-sided silicon detectors. In S. Franssila, & R. Paananen (Eds.), Proceedings of the 15th Nordic Semiconductor Meeting (pp. 247-250). VTT Technical Research Centre of Finland.