Status of the process to produce large area double-sided silicon detectors

Simo Eränen, Teija Häkkinen, Kari Leinonen, I. Hietanen, C. Rönnqvist, T. Schulman, T. Tuuva, M. Voutilainen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Original languageEnglish
    Title of host publicationProceedings of the 15th Nordic Semiconductor Meeting
    EditorsSami Franssila, Riitta Paananen
    Place of PublicationEspoo
    PublisherVTT Technical Research Centre of Finland
    Pages247-250
    ISBN (Print)951-47-6261-4
    Publication statusPublished - 1992
    MoE publication typeB3 Non-refereed article in conference proceedings
    Event15th Nordic Semiconductor Meeting - Hämeenlinna, Finland
    Duration: 9 Jun 199211 Jun 1992
    Conference number: 15

    Conference

    Conference15th Nordic Semiconductor Meeting
    CountryFinland
    CityHämeenlinna
    Period9/06/9211/06/92

    Cite this