Step and stamp imprint lithography in selective-area epitaxy of nanowires

J.-P. Kakko, A. Tanabe Gädda, Tomi Haatainen, V. Dhaka, T. Haggrén, T. Huhtio, S. Franssila, H. Lipsanen

    Research output: Contribution to conferenceConference PosterScientific

    Original languageEnglish
    Publication statusPublished - 2013
    MoE publication typeNot Eligible
    Event7th Nanowire Growth Workshop - Lausanne, Switzerland
    Duration: 10 Jun 201312 Jun 2013

    Conference

    Conference7th Nanowire Growth Workshop
    CountrySwitzerland
    CityLausanne
    Period10/06/1312/06/13

    Keywords

    • NIL
    • nanoimprinting
    • SSIL
    • step and stamp
    • step&repeat

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