Step and stamp imprint lithography in selective-area epitaxy of nanowires

J.-P. Kakko, A. Tanabe Gädda, Tomi Haatainen, V. Dhaka, T. Haggrén, T. Huhtio, S. Franssila, H. Lipsanen

Research output: Contribution to conference › Conference Poster › Scientific

Original language	English
Publication status	Published - 2013
MoE publication type	Not Eligible
Event	7th Nanowire Growth Workshop - Lausanne, Switzerland Duration: 10 Jun 2013 → 12 Jun 2013

Keywords

@conference{673a016b69b3449d8da588261786a5f7,

title = "Step and stamp imprint lithography in selective-area epitaxy of nanowires",

keywords = "NIL, nanoimprinting, SSIL, step and stamp, step&repeat",

author = "J.-P. Kakko and {Tanabe G{\"a}dda}, A. and Tomi Haatainen and V. Dhaka and T. Haggr{\'e}n and T. Huhtio and S. Franssila and H. Lipsanen",

year = "2013",

language = "English",

note = "7th Nanowire Growth Workshop ; Conference date: 10-06-2013 Through 12-06-2013",

}

TY - CONF

T1 - Step and stamp imprint lithography in selective-area epitaxy of nanowires

AU - Kakko, J.-P.

AU - Tanabe Gädda, A.

AU - Haatainen, Tomi

AU - Dhaka, V.

AU - Haggrén, T.

AU - Huhtio, T.

AU - Franssila, S.

AU - Lipsanen, H.

PY - 2013

Y1 - 2013

KW - NIL

KW - nanoimprinting

KW - SSIL

KW - step and stamp

KW - step&repeat

M3 - Conference Poster

T2 - 7th Nanowire Growth Workshop

Y2 - 10 June 2013 through 12 June 2013

ER -