Step and stamp imprint lithography in selective-area epitaxy of nanowires

J.-P. Kakko, A. Tanabe Gädda, Tomi Haatainen, V. Dhaka, T. Haggrén, T. Huhtio, S. Franssila, H. Lipsanen

Research output: Contribution to conferenceConference PosterScientific

Original languageEnglish
Publication statusPublished - 2013
MoE publication typeNot Eligible
Event7th Nanowire Growth Workshop - Lausanne, Switzerland
Duration: 10 Jun 201312 Jun 2013

Conference

Conference7th Nanowire Growth Workshop
CountrySwitzerland
CityLausanne
Period10/06/1312/06/13

Keywords

  • NIL
  • nanoimprinting
  • SSIL
  • step and stamp
  • step&repeat

Cite this

Kakko, J-P., Tanabe Gädda, A., Haatainen, T., Dhaka, V., Haggrén, T., Huhtio, T., ... Lipsanen, H. (2013). Step and stamp imprint lithography in selective-area epitaxy of nanowires. Poster session presented at 7th Nanowire Growth Workshop, Lausanne, Switzerland.
Kakko, J.-P. ; Tanabe Gädda, A. ; Haatainen, Tomi ; Dhaka, V. ; Haggrén, T. ; Huhtio, T. ; Franssila, S. ; Lipsanen, H. / Step and stamp imprint lithography in selective-area epitaxy of nanowires. Poster session presented at 7th Nanowire Growth Workshop, Lausanne, Switzerland.
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title = "Step and stamp imprint lithography in selective-area epitaxy of nanowires",
keywords = "NIL, nanoimprinting, SSIL, step and stamp, step&repeat",
author = "J.-P. Kakko and {Tanabe G{\"a}dda}, A. and Tomi Haatainen and V. Dhaka and T. Haggr{\'e}n and T. Huhtio and S. Franssila and H. Lipsanen",
year = "2013",
language = "English",
note = "7th Nanowire Growth Workshop ; Conference date: 10-06-2013 Through 12-06-2013",

}

Kakko, J-P, Tanabe Gädda, A, Haatainen, T, Dhaka, V, Haggrén, T, Huhtio, T, Franssila, S & Lipsanen, H 2013, 'Step and stamp imprint lithography in selective-area epitaxy of nanowires' 7th Nanowire Growth Workshop, Lausanne, Switzerland, 10/06/13 - 12/06/13, .

Step and stamp imprint lithography in selective-area epitaxy of nanowires. / Kakko, J.-P.; Tanabe Gädda, A.; Haatainen, Tomi; Dhaka, V.; Haggrén, T.; Huhtio, T.; Franssila, S.; Lipsanen, H.

2013. Poster session presented at 7th Nanowire Growth Workshop, Lausanne, Switzerland.

Research output: Contribution to conferenceConference PosterScientific

TY - CONF

T1 - Step and stamp imprint lithography in selective-area epitaxy of nanowires

AU - Kakko, J.-P.

AU - Tanabe Gädda, A.

AU - Haatainen, Tomi

AU - Dhaka, V.

AU - Haggrén, T.

AU - Huhtio, T.

AU - Franssila, S.

AU - Lipsanen, H.

PY - 2013

Y1 - 2013

KW - NIL

KW - nanoimprinting

KW - SSIL

KW - step and stamp

KW - step&repeat

M3 - Conference Poster

ER -

Kakko J-P, Tanabe Gädda A, Haatainen T, Dhaka V, Haggrén T, Huhtio T et al. Step and stamp imprint lithography in selective-area epitaxy of nanowires. 2013. Poster session presented at 7th Nanowire Growth Workshop, Lausanne, Switzerland.