Step and stamp imprint lithography in selective-area epitaxy of nanowires

J.-P. Kakko, A. Tanabe Gädda, Tomi Haatainen, V. Dhaka, T. Haggrén, T. Huhtio, S. Franssila, H. Lipsanen

    Research output: Contribution to conferenceConference PosterScientific

    Original languageEnglish
    Publication statusPublished - 2013
    MoE publication typeNot Eligible
    Event7th Nanowire Growth Workshop - Lausanne, Switzerland
    Duration: 10 Jun 201312 Jun 2013

    Conference

    Conference7th Nanowire Growth Workshop
    CountrySwitzerland
    CityLausanne
    Period10/06/1312/06/13

    Keywords

    • NIL
    • nanoimprinting
    • SSIL
    • step and stamp
    • step&repeat

    Cite this

    Kakko, J-P., Tanabe Gädda, A., Haatainen, T., Dhaka, V., Haggrén, T., Huhtio, T., Franssila, S., & Lipsanen, H. (2013). Step and stamp imprint lithography in selective-area epitaxy of nanowires. Poster session presented at 7th Nanowire Growth Workshop, Lausanne, Switzerland.