Original language | English |
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Publication status | Published - 2013 |
MoE publication type | Not Eligible |
Event | 7th Nanowire Growth Workshop - Lausanne, Switzerland Duration: 10 Jun 2013 → 12 Jun 2013 |
Conference
Conference | 7th Nanowire Growth Workshop |
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Country | Switzerland |
City | Lausanne |
Period | 10/06/13 → 12/06/13 |
Keywords
- NIL
- nanoimprinting
- SSIL
- step and stamp
- step&repeat
Cite this
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Step and stamp imprint lithography in selective-area epitaxy of nanowires. / Kakko, J.-P.; Tanabe Gädda, A.; Haatainen, Tomi; Dhaka, V.; Haggrén, T.; Huhtio, T.; Franssila, S.; Lipsanen, H.
2013. Poster session presented at 7th Nanowire Growth Workshop, Lausanne, Switzerland.Research output: Contribution to conference › Conference Poster › Scientific
TY - CONF
T1 - Step and stamp imprint lithography in selective-area epitaxy of nanowires
AU - Kakko, J.-P.
AU - Tanabe Gädda, A.
AU - Haatainen, Tomi
AU - Dhaka, V.
AU - Haggrén, T.
AU - Huhtio, T.
AU - Franssila, S.
AU - Lipsanen, H.
PY - 2013
Y1 - 2013
KW - NIL
KW - nanoimprinting
KW - SSIL
KW - step and stamp
KW - step&repeat
M3 - Conference Poster
ER -