Step&stamp imprint lithography

Tomi Haatainen; Jouni Ahopelto

Step&stamp imprint lithography

Research output: Contribution to conference › Other conference contribution › Scientific

Original language	English
Publication status	Published - 2001
MoE publication type	Not Eligible
Event	19th Nordic Semiconductor Meeting, NSM19 - Copenhagen, Denmark Duration: 20 May 2001 → 23 May 2001

Conference

Conference	19th Nordic Semiconductor Meeting, NSM19
Abbreviated title	NSM19
Country/Territory	Denmark
City	Copenhagen
Period	20/05/01 → 23/05/01

Cite this

@conference{17bc75baf8fb43e2aca5c2a7d613a9b7,

title = "Step&stamp imprint lithography",

author = "Tomi Haatainen and Jouni Ahopelto",

note = "not in proceedings:https://iopscience.iop.org/issue/1402-4896/2002/T101 ; 19th Nordic Semiconductor Meeting, NSM19<br/>, NSM19 ; Conference date: 20-05-2001 Through 23-05-2001",

year = "2001",

language = "English",

}