Step&stamp imprint lithography

    Research output: Contribution to conferenceOther conference contributionScientific

    Original languageEnglish
    Publication statusPublished - 2001
    MoE publication typeNot Eligible
    Event19th Nordic Semiconductor Meeting, NSM19
    - Copenhagen, Denmark
    Duration: 20 May 200123 May 2001

    Conference

    Conference19th Nordic Semiconductor Meeting, NSM19
    Abbreviated titleNSM19
    CountryDenmark
    CityCopenhagen
    Period20/05/0123/05/01

    Cite this

    Haatainen, T., & Ahopelto, J. (2001). Step&stamp imprint lithography. 19th Nordic Semiconductor Meeting, NSM19
    , Copenhagen, Denmark.
    Haatainen, Tomi ; Ahopelto, Jouni. / Step&stamp imprint lithography. 19th Nordic Semiconductor Meeting, NSM19
    , Copenhagen, Denmark.
    @conference{17bc75baf8fb43e2aca5c2a7d613a9b7,
    title = "Step&stamp imprint lithography",
    author = "Tomi Haatainen and Jouni Ahopelto",
    note = "not in proceedings:https://iopscience.iop.org/issue/1402-4896/2002/T101 ; 19th Nordic Semiconductor Meeting, NSM19<br/>, NSM19 ; Conference date: 20-05-2001 Through 23-05-2001",
    year = "2001",
    language = "English",

    }

    Haatainen, T & Ahopelto, J 2001, 'Step&stamp imprint lithography', 19th Nordic Semiconductor Meeting, NSM19
    , Copenhagen, Denmark, 20/05/01 - 23/05/01.

    Step&stamp imprint lithography. / Haatainen, Tomi; Ahopelto, Jouni.

    2001. 19th Nordic Semiconductor Meeting, NSM19
    , Copenhagen, Denmark.

    Research output: Contribution to conferenceOther conference contributionScientific

    TY - CONF

    T1 - Step&stamp imprint lithography

    AU - Haatainen, Tomi

    AU - Ahopelto, Jouni

    N1 - not in proceedings:https://iopscience.iop.org/issue/1402-4896/2002/T101

    PY - 2001

    Y1 - 2001

    M3 - Other conference contribution

    ER -

    Haatainen T, Ahopelto J. Step&stamp imprint lithography. 2001. 19th Nordic Semiconductor Meeting, NSM19
    , Copenhagen, Denmark.