Step&Stamp imprint lithography: a versatile method for nanoimprinting

Tomi Haatainen, Jouni Ahopelto

    Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

    Original languageEnglish
    Title of host publicationProceedings of the First International Conference on Nanoimprint Nanoprint Technology, San Francisco, CA, 11-13 Dec,2002
    Place of PublicationSan Francisco
    PublisherNaval Research Laboratory
    Pages20-21
    Publication statusPublished - 2002
    MoE publication typeNot Eligible
    Event1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 - San Francisco, United States
    Duration: 11 Dec 2002 → 13 Dec 2002
    http://www.nntconf.org/pdf/2002ProgramSchedule.pdf (Conference Programme)

    Conference

    Conference1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02
    Abbreviated titleNNT 2002
    Country/TerritoryUnited States
    CitySan Francisco
    Period11/12/02 → 13/12/02
    Internet address

    Keywords

    • Nanoimprint Lithography

    Cite this