Step&Stamp imprint lithography: a versatile method for nanoimprinting

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationProceedings of the First International Conference on Nanoimprint Nanoprint Technology, San Francisco, CA, 11-13 Dec,2002
    Place of PublicationSan Francisco
    Pages20-21
    Publication statusPublished - 2002
    MoE publication typeNot Eligible
    Event1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 - San Francisco, United States
    Duration: 11 Dec 200213 Dec 2002

    Conference

    Conference1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02
    Abbreviated titleNNT 2002
    CountryUnited States
    CitySan Francisco
    Period11/12/0213/12/02

    Keywords

    • Nanoimprint Lithography

    Cite this

    Haatainen, T., & Ahopelto, J. (2002). Step&Stamp imprint lithography: a versatile method for nanoimprinting. In Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, San Francisco, CA, 11-13 Dec,2002 (pp. 20-21). San Francisco.
    Haatainen, Tomi ; Ahopelto, Jouni. / Step&Stamp imprint lithography: a versatile method for nanoimprinting. Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, San Francisco, CA, 11-13 Dec,2002. San Francisco, 2002. pp. 20-21
    @inbook{8d57b7d5ba6d4b6092b9101a385e1b06,
    title = "Step&Stamp imprint lithography: a versatile method for nanoimprinting",
    keywords = "Nanoimprint Lithography",
    author = "Tomi Haatainen and Jouni Ahopelto",
    year = "2002",
    language = "English",
    pages = "20--21",
    booktitle = "Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, San Francisco, CA, 11-13 Dec,2002",

    }

    Haatainen, T & Ahopelto, J 2002, Step&Stamp imprint lithography: a versatile method for nanoimprinting. in Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, San Francisco, CA, 11-13 Dec,2002. San Francisco, pp. 20-21, 1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 , San Francisco, United States, 11/12/02.

    Step&Stamp imprint lithography: a versatile method for nanoimprinting. / Haatainen, Tomi; Ahopelto, Jouni.

    Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, San Francisco, CA, 11-13 Dec,2002. San Francisco, 2002. p. 20-21.

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    TY - CHAP

    T1 - Step&Stamp imprint lithography: a versatile method for nanoimprinting

    AU - Haatainen, Tomi

    AU - Ahopelto, Jouni

    PY - 2002

    Y1 - 2002

    KW - Nanoimprint Lithography

    M3 - Conference abstract in proceedings

    SP - 20

    EP - 21

    BT - Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, San Francisco, CA, 11-13 Dec,2002

    CY - San Francisco

    ER -

    Haatainen T, Ahopelto J. Step&Stamp imprint lithography: a versatile method for nanoimprinting. In Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, San Francisco, CA, 11-13 Dec,2002. San Francisco. 2002. p. 20-21