Step&Stamp imprint lithography: a versatile method for nanoimprinting

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationProceedings of the First International Conference on Nanoimprint Nanoprint Technology, San Francisco, CA, 11-13 Dec,2002
    Place of PublicationSan Francisco
    Pages20-21
    Publication statusPublished - 2002
    MoE publication typeNot Eligible
    Event1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 - San Francisco, United States
    Duration: 11 Dec 200213 Dec 2002

    Conference

    Conference1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02
    Abbreviated titleNNT 2002
    CountryUnited States
    CitySan Francisco
    Period11/12/0213/12/02

    Keywords

    • Nanoimprint Lithography

    Cite this

    Haatainen, T., & Ahopelto, J. (2002). Step&Stamp imprint lithography: a versatile method for nanoimprinting. In Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, San Francisco, CA, 11-13 Dec,2002 (pp. 20-21).