Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2 O3 extracted from their impact on film conformality

Karsten Arts (Corresponding Author), Vincent Vandalon, Riikka L. Puurunen, Mikko Utriainen, Feng Gao, Wilhelmus M.M. Erwin Kessels, Harm C.M. Knoops (Corresponding Author)

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Abstract

The conformality of a film grown by atomic layer deposition (ALD) is strongly affected by the reactivities of the precursor and coreactant, which can be expressed in terms of their sticking probabilities toward the surface. We show that the leading front of the thickness profile in high-aspect-ratio structures gives direct information on the sticking probabilities of the reactants under most conditions. The slope of the front has been used to determine the sticking probabilities of Al(CH3)3 and H2O during ALD of Al2O3 . The determined values are (0.5-2) × 10-3 for Al(CH3)3 and (0.8-2) × 10-4 for H2O at a set-point temperature of 275 °C, corresponding to an estimated substrate temperature of ∼220 °C. Additionally, the thickness profiles reveal soft-saturation behavior during the H2O step, most dominantly at reduced temperatures, which can limit the conformality of Al2O3 grown by ALD. This work thus provides insights regarding quantitative information on sticking probabilities and conformality during ALD, which is valuable for gaining a deeper understanding of ALD kinetics.

Original languageEnglish
Article number030908
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume37
Issue number3
DOIs
Publication statusE-pub ahead of print - 24 Apr 2019
MoE publication typeA1 Journal article-refereed

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Atomic layer deposition
atomic layer epitaxy
profiles
high aspect ratio
Temperature
temperature
Aspect ratio
reactivity
slopes
saturation
Kinetics
kinetics
Substrates

Cite this

@article{abbf72cca8654c1aa00d0a2af0f367da,
title = "Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2 O3 extracted from their impact on film conformality",
abstract = "The conformality of a film grown by atomic layer deposition (ALD) is strongly affected by the reactivities of the precursor and coreactant, which can be expressed in terms of their sticking probabilities toward the surface. We show that the leading front of the thickness profile in high-aspect-ratio structures gives direct information on the sticking probabilities of the reactants under most conditions. The slope of the front has been used to determine the sticking probabilities of Al(CH3)3 and H2O during ALD of Al2O3 . The determined values are (0.5-2) × 10-3 for Al(CH3)3 and (0.8-2) × 10-4 for H2O at a set-point temperature of 275 °C, corresponding to an estimated substrate temperature of ∼220 °C. Additionally, the thickness profiles reveal soft-saturation behavior during the H2O step, most dominantly at reduced temperatures, which can limit the conformality of Al2O3 grown by ALD. This work thus provides insights regarding quantitative information on sticking probabilities and conformality during ALD, which is valuable for gaining a deeper understanding of ALD kinetics.",
author = "Karsten Arts and Vincent Vandalon and Puurunen, {Riikka L.} and Mikko Utriainen and Feng Gao and {Erwin Kessels}, {Wilhelmus M.M.} and Knoops, {Harm C.M.}",
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journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
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Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2 O3 extracted from their impact on film conformality. / Arts, Karsten (Corresponding Author); Vandalon, Vincent; Puurunen, Riikka L.; Utriainen, Mikko; Gao, Feng; Erwin Kessels, Wilhelmus M.M.; Knoops, Harm C.M. (Corresponding Author).

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 37, No. 3, 030908, 24.04.2019.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2 O3 extracted from their impact on film conformality

AU - Arts, Karsten

AU - Vandalon, Vincent

AU - Puurunen, Riikka L.

AU - Utriainen, Mikko

AU - Gao, Feng

AU - Erwin Kessels, Wilhelmus M.M.

AU - Knoops, Harm C.M.

PY - 2019/4/24

Y1 - 2019/4/24

N2 - The conformality of a film grown by atomic layer deposition (ALD) is strongly affected by the reactivities of the precursor and coreactant, which can be expressed in terms of their sticking probabilities toward the surface. We show that the leading front of the thickness profile in high-aspect-ratio structures gives direct information on the sticking probabilities of the reactants under most conditions. The slope of the front has been used to determine the sticking probabilities of Al(CH3)3 and H2O during ALD of Al2O3 . The determined values are (0.5-2) × 10-3 for Al(CH3)3 and (0.8-2) × 10-4 for H2O at a set-point temperature of 275 °C, corresponding to an estimated substrate temperature of ∼220 °C. Additionally, the thickness profiles reveal soft-saturation behavior during the H2O step, most dominantly at reduced temperatures, which can limit the conformality of Al2O3 grown by ALD. This work thus provides insights regarding quantitative information on sticking probabilities and conformality during ALD, which is valuable for gaining a deeper understanding of ALD kinetics.

AB - The conformality of a film grown by atomic layer deposition (ALD) is strongly affected by the reactivities of the precursor and coreactant, which can be expressed in terms of their sticking probabilities toward the surface. We show that the leading front of the thickness profile in high-aspect-ratio structures gives direct information on the sticking probabilities of the reactants under most conditions. The slope of the front has been used to determine the sticking probabilities of Al(CH3)3 and H2O during ALD of Al2O3 . The determined values are (0.5-2) × 10-3 for Al(CH3)3 and (0.8-2) × 10-4 for H2O at a set-point temperature of 275 °C, corresponding to an estimated substrate temperature of ∼220 °C. Additionally, the thickness profiles reveal soft-saturation behavior during the H2O step, most dominantly at reduced temperatures, which can limit the conformality of Al2O3 grown by ALD. This work thus provides insights regarding quantitative information on sticking probabilities and conformality during ALD, which is valuable for gaining a deeper understanding of ALD kinetics.

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