Abstract
| Original language | English |
|---|---|
| Pages (from-to) | 4130-4137 |
| Number of pages | 8 |
| Journal | Journal of Applied Physics |
| Volume | 76 |
| Issue number | 7 |
| DOIs | |
| Publication status | Published - 1994 |
| MoE publication type | A1 Journal article-refereed |
Fingerprint
Cite this
}
Strained film deposition of thin substrates : Resulting internal strains with an application to prestrained and preshaped multilayered membranes for a soft‐x‐ray window. / Mutikainen, Risto.
In: Journal of Applied Physics, Vol. 76, No. 7, 1994, p. 4130-4137.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - Strained film deposition of thin substrates
T2 - Resulting internal strains with an application to prestrained and preshaped multilayered membranes for a soft‐x‐ray window
AU - Mutikainen, Risto
N1 - Project code: ELE3021
PY - 1994
Y1 - 1994
N2 - When a strained film is deposited on a thin substrate or membrane able to relax laterally, the film induces strains into the substrate. Accordingly, the continuing relaxation of the film‐substrate system during deposition generates a nonuniform strain field in the film itself. In this study, the substrate shrinkage or expansion and nonuniform strain distributions within the deposited film are derived. Also, the induced strains due to the pressurization of initially strained and buckled multilayered membranes are analyzed. The lateral expansion of a thin membrane by a compressively strained coating is applied to increase the pressure endurance of the membrane‐coating system. An experimental comparison of pressure endurance is presented for polyimide‐based soft‐x‐ray windows of about a thickness of 200 nm, with thin coatings in various stress states. The strains within the window membrane are calculated by applying the derived formulae successively to the supporting grid and to the membrane cells.
AB - When a strained film is deposited on a thin substrate or membrane able to relax laterally, the film induces strains into the substrate. Accordingly, the continuing relaxation of the film‐substrate system during deposition generates a nonuniform strain field in the film itself. In this study, the substrate shrinkage or expansion and nonuniform strain distributions within the deposited film are derived. Also, the induced strains due to the pressurization of initially strained and buckled multilayered membranes are analyzed. The lateral expansion of a thin membrane by a compressively strained coating is applied to increase the pressure endurance of the membrane‐coating system. An experimental comparison of pressure endurance is presented for polyimide‐based soft‐x‐ray windows of about a thickness of 200 nm, with thin coatings in various stress states. The strains within the window membrane are calculated by applying the derived formulae successively to the supporting grid and to the membrane cells.
U2 - 10.1063/1.357363
DO - 10.1063/1.357363
M3 - Article
VL - 76
SP - 4130
EP - 4137
JO - Journal of Applied Physics
JF - Journal of Applied Physics
SN - 0021-8979
IS - 7
ER -