Strained film deposition of thin substrates

Resulting internal strains with an application to prestrained and preshaped multilayered membranes for a soft‐x‐ray window

Risto Mutikainen

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Abstract

When a strained film is deposited on a thin substrate or membrane able to relax laterally, the film induces strains into the substrate. Accordingly, the continuing relaxation of the film‐substrate system during deposition generates a nonuniform strain field in the film itself. In this study, the substrate shrinkage or expansion and nonuniform strain distributions within the deposited film are derived. Also, the induced strains due to the pressurization of initially strained and buckled multilayered membranes are analyzed. The lateral expansion of a thin membrane by a compressively strained coating is applied to increase the pressure endurance of the membrane‐coating system. An experimental comparison of pressure endurance is presented for polyimide‐based soft‐x‐ray windows of about a thickness of 200 nm, with thin coatings in various stress states. The strains within the window membrane are calculated by applying the derived formulae successively to the supporting grid and to the membrane cells.
Original languageEnglish
Pages (from-to)4130-4137
Number of pages8
JournalJournal of Applied Physics
Volume76
Issue number7
DOIs
Publication statusPublished - 1994
MoE publication typeA1 Journal article-refereed

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membranes
endurance
coatings
expansion
strain distribution
shrinkage
grids

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@article{bd4c9120e177406bb49cff1c1732888c,
title = "Strained film deposition of thin substrates: Resulting internal strains with an application to prestrained and preshaped multilayered membranes for a soft‐x‐ray window",
abstract = "When a strained film is deposited on a thin substrate or membrane able to relax laterally, the film induces strains into the substrate. Accordingly, the continuing relaxation of the film‐substrate system during deposition generates a nonuniform strain field in the film itself. In this study, the substrate shrinkage or expansion and nonuniform strain distributions within the deposited film are derived. Also, the induced strains due to the pressurization of initially strained and buckled multilayered membranes are analyzed. The lateral expansion of a thin membrane by a compressively strained coating is applied to increase the pressure endurance of the membrane‐coating system. An experimental comparison of pressure endurance is presented for polyimide‐based soft‐x‐ray windows of about a thickness of 200 nm, with thin coatings in various stress states. The strains within the window membrane are calculated by applying the derived formulae successively to the supporting grid and to the membrane cells.",
author = "Risto Mutikainen",
note = "Project code: ELE3021",
year = "1994",
doi = "10.1063/1.357363",
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pages = "4130--4137",
journal = "Journal of Applied Physics",
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publisher = "American Institute of Physics AIP",
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Strained film deposition of thin substrates : Resulting internal strains with an application to prestrained and preshaped multilayered membranes for a soft‐x‐ray window. / Mutikainen, Risto.

In: Journal of Applied Physics, Vol. 76, No. 7, 1994, p. 4130-4137.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Strained film deposition of thin substrates

T2 - Resulting internal strains with an application to prestrained and preshaped multilayered membranes for a soft‐x‐ray window

AU - Mutikainen, Risto

N1 - Project code: ELE3021

PY - 1994

Y1 - 1994

N2 - When a strained film is deposited on a thin substrate or membrane able to relax laterally, the film induces strains into the substrate. Accordingly, the continuing relaxation of the film‐substrate system during deposition generates a nonuniform strain field in the film itself. In this study, the substrate shrinkage or expansion and nonuniform strain distributions within the deposited film are derived. Also, the induced strains due to the pressurization of initially strained and buckled multilayered membranes are analyzed. The lateral expansion of a thin membrane by a compressively strained coating is applied to increase the pressure endurance of the membrane‐coating system. An experimental comparison of pressure endurance is presented for polyimide‐based soft‐x‐ray windows of about a thickness of 200 nm, with thin coatings in various stress states. The strains within the window membrane are calculated by applying the derived formulae successively to the supporting grid and to the membrane cells.

AB - When a strained film is deposited on a thin substrate or membrane able to relax laterally, the film induces strains into the substrate. Accordingly, the continuing relaxation of the film‐substrate system during deposition generates a nonuniform strain field in the film itself. In this study, the substrate shrinkage or expansion and nonuniform strain distributions within the deposited film are derived. Also, the induced strains due to the pressurization of initially strained and buckled multilayered membranes are analyzed. The lateral expansion of a thin membrane by a compressively strained coating is applied to increase the pressure endurance of the membrane‐coating system. An experimental comparison of pressure endurance is presented for polyimide‐based soft‐x‐ray windows of about a thickness of 200 nm, with thin coatings in various stress states. The strains within the window membrane are calculated by applying the derived formulae successively to the supporting grid and to the membrane cells.

U2 - 10.1063/1.357363

DO - 10.1063/1.357363

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JO - Journal of Applied Physics

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