Stress in atomic layer deposited aluminium oxide and titanium dioxide thin films

Oili Ylivaara (Corresponding author), Riikka L. Puurunen, Mikko Laitinen, Sakari Sintonen, Saima Ali, Timo Sajavaara, Harri Lipsanen, Jyrki Kiihamäki

    Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

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