Stresses in ALD films: Aiming for zero stress thin films

Riina Ritasalo, Oili Ylivaara, Tero Pilvi, Tommi Suni

    Research output: Contribution to conferenceConference AbstractScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 16 Oct 2018
    MoE publication typeNot Eligible
    Event4th International Conference on ALD Applications and 2018 China ALD Conference, CALD2018 - Shenzhen, China
    Duration: 14 Oct 201817 Oct 2018
    Conference number: 4
    http://www.c-ald.com

    Conference

    Conference4th International Conference on ALD Applications and 2018 China ALD Conference, CALD2018
    Abbreviated titleCALD2018
    CountryChina
    CityShenzhen
    Period14/10/1817/10/18
    Internet address

    Cite this

    Ritasalo, R., Ylivaara, O., Pilvi, T., & Suni, T. (2018). Stresses in ALD films: Aiming for zero stress thin films. Abstract from 4th International Conference on ALD Applications and 2018 China ALD Conference, CALD2018 , Shenzhen, China.
    Ritasalo, Riina ; Ylivaara, Oili ; Pilvi, Tero ; Suni, Tommi. / Stresses in ALD films : Aiming for zero stress thin films. Abstract from 4th International Conference on ALD Applications and 2018 China ALD Conference, CALD2018 , Shenzhen, China.
    @conference{1ffb13615d2a45e0a31963574c0d6567,
    title = "Stresses in ALD films: Aiming for zero stress thin films",
    author = "Riina Ritasalo and Oili Ylivaara and Tero Pilvi and Tommi Suni",
    note = "abstract reviewed; 4th International Conference on ALD Applications and 2018 China ALD Conference, CALD2018 , CALD2018 ; Conference date: 14-10-2018 Through 17-10-2018",
    year = "2018",
    month = "10",
    day = "16",
    language = "English",
    url = "http://www.c-ald.com",

    }

    Ritasalo, R, Ylivaara, O, Pilvi, T & Suni, T 2018, 'Stresses in ALD films: Aiming for zero stress thin films', 4th International Conference on ALD Applications and 2018 China ALD Conference, CALD2018 , Shenzhen, China, 14/10/18 - 17/10/18.

    Stresses in ALD films : Aiming for zero stress thin films. / Ritasalo, Riina; Ylivaara, Oili; Pilvi, Tero; Suni, Tommi.

    2018. Abstract from 4th International Conference on ALD Applications and 2018 China ALD Conference, CALD2018 , Shenzhen, China.

    Research output: Contribution to conferenceConference AbstractScientificpeer-review

    TY - CONF

    T1 - Stresses in ALD films

    T2 - Aiming for zero stress thin films

    AU - Ritasalo, Riina

    AU - Ylivaara, Oili

    AU - Pilvi, Tero

    AU - Suni, Tommi

    N1 - abstract reviewed

    PY - 2018/10/16

    Y1 - 2018/10/16

    M3 - Conference Abstract

    ER -

    Ritasalo R, Ylivaara O, Pilvi T, Suni T. Stresses in ALD films: Aiming for zero stress thin films. 2018. Abstract from 4th International Conference on ALD Applications and 2018 China ALD Conference, CALD2018 , Shenzhen, China.