Stresses in ALD films

Aiming for zero stress thin films

Riina Ritasalo, Oili Ylivaara, Tero Pilvi, Tommi Suni

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Original languageEnglish
Publication statusPublished - 16 Oct 2018
MoE publication typeNot Eligible
Event4th International Conference on ALD Applications and 2018 China ALD Conference, CALD2018 - Shenzhen, China
Duration: 14 Oct 201817 Oct 2018
Conference number: 4
http://www.c-ald.com

Conference

Conference4th International Conference on ALD Applications and 2018 China ALD Conference, CALD2018
Abbreviated titleCALD2018
CountryChina
CityShenzhen
Period14/10/1817/10/18
Internet address

Cite this

Ritasalo, R., Ylivaara, O., Pilvi, T., & Suni, T. (2018). Stresses in ALD films: Aiming for zero stress thin films. Abstract from 4th International Conference on ALD Applications and 2018 China ALD Conference, CALD2018 , Shenzhen, China.
Ritasalo, Riina ; Ylivaara, Oili ; Pilvi, Tero ; Suni, Tommi. / Stresses in ALD films : Aiming for zero stress thin films. Abstract from 4th International Conference on ALD Applications and 2018 China ALD Conference, CALD2018 , Shenzhen, China.
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title = "Stresses in ALD films: Aiming for zero stress thin films",
author = "Riina Ritasalo and Oili Ylivaara and Tero Pilvi and Tommi Suni",
note = "abstract reviewed; 4th International Conference on ALD Applications and 2018 China ALD Conference, CALD2018 , CALD2018 ; Conference date: 14-10-2018 Through 17-10-2018",
year = "2018",
month = "10",
day = "16",
language = "English",
url = "http://www.c-ald.com",

}

Ritasalo, R, Ylivaara, O, Pilvi, T & Suni, T 2018, 'Stresses in ALD films: Aiming for zero stress thin films' 4th International Conference on ALD Applications and 2018 China ALD Conference, CALD2018 , Shenzhen, China, 14/10/18 - 17/10/18, .

Stresses in ALD films : Aiming for zero stress thin films. / Ritasalo, Riina; Ylivaara, Oili; Pilvi, Tero; Suni, Tommi.

2018. Abstract from 4th International Conference on ALD Applications and 2018 China ALD Conference, CALD2018 , Shenzhen, China.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

TY - CONF

T1 - Stresses in ALD films

T2 - Aiming for zero stress thin films

AU - Ritasalo, Riina

AU - Ylivaara, Oili

AU - Pilvi, Tero

AU - Suni, Tommi

N1 - abstract reviewed

PY - 2018/10/16

Y1 - 2018/10/16

M3 - Conference Abstract

ER -

Ritasalo R, Ylivaara O, Pilvi T, Suni T. Stresses in ALD films: Aiming for zero stress thin films. 2018. Abstract from 4th International Conference on ALD Applications and 2018 China ALD Conference, CALD2018 , Shenzhen, China.