Stresses in ALD films: aiming for zero stress thin films

Riina Ritasalo, Oili M.E. Ylivaara, Tero Pilvi, Tommi Suni, Alexey Veselov

    Research output: Contribution to conferenceConference AbstractScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 14 May 2019
    MoE publication typeNot Eligible
    Event14th International conference on Films and Coatings 2019 - Saint-Petersburg state electrotechnical University "LETI" named after V. I. Ulyanov (Lenin), St. Petersburg, Russian Federation
    Duration: 14 May 201916 May 2019
    http://onlinereg.ru/site.php?go=294&lang=ENG

    Conference

    Conference14th International conference on Films and Coatings 2019
    CountryRussian Federation
    CitySt. Petersburg
    Period14/05/1916/05/19
    Internet address

    Cite this

    Ritasalo, R., Ylivaara, O. M. E., Pilvi, T., Suni, T., & Veselov, A. (2019). Stresses in ALD films: aiming for zero stress thin films. Abstract from 14th International conference on Films and Coatings 2019, St. Petersburg, Russian Federation.
    Ritasalo, Riina ; Ylivaara, Oili M.E. ; Pilvi, Tero ; Suni, Tommi ; Veselov, Alexey. / Stresses in ALD films : aiming for zero stress thin films. Abstract from 14th International conference on Films and Coatings 2019, St. Petersburg, Russian Federation.
    @conference{b940f211bb1d48f48752a877f6e5f241,
    title = "Stresses in ALD films: aiming for zero stress thin films",
    author = "Riina Ritasalo and Ylivaara, {Oili M.E.} and Tero Pilvi and Tommi Suni and Alexey Veselov",
    note = "Abstract and oral presentation based on the abstract; 14th International conference on Films and Coatings 2019 ; Conference date: 14-05-2019 Through 16-05-2019",
    year = "2019",
    month = "5",
    day = "14",
    language = "English",
    url = "http://onlinereg.ru/site.php?go=294&lang=ENG",

    }

    Ritasalo, R, Ylivaara, OME, Pilvi, T, Suni, T & Veselov, A 2019, 'Stresses in ALD films: aiming for zero stress thin films', 14th International conference on Films and Coatings 2019, St. Petersburg, Russian Federation, 14/05/19 - 16/05/19.

    Stresses in ALD films : aiming for zero stress thin films. / Ritasalo, Riina; Ylivaara, Oili M.E.; Pilvi, Tero; Suni, Tommi; Veselov, Alexey.

    2019. Abstract from 14th International conference on Films and Coatings 2019, St. Petersburg, Russian Federation.

    Research output: Contribution to conferenceConference AbstractScientificpeer-review

    TY - CONF

    T1 - Stresses in ALD films

    T2 - aiming for zero stress thin films

    AU - Ritasalo, Riina

    AU - Ylivaara, Oili M.E.

    AU - Pilvi, Tero

    AU - Suni, Tommi

    AU - Veselov, Alexey

    N1 - Abstract and oral presentation based on the abstract

    PY - 2019/5/14

    Y1 - 2019/5/14

    UR - http://onlinereg.ru/site.php?go=294&page=6759&lang=ENG

    M3 - Conference Abstract

    ER -

    Ritasalo R, Ylivaara OME, Pilvi T, Suni T, Veselov A. Stresses in ALD films: aiming for zero stress thin films. 2019. Abstract from 14th International conference on Films and Coatings 2019, St. Petersburg, Russian Federation.