Stresses in ALD films: aiming for zero stress thin films

Riina Ritasalo, Oili M.E. Ylivaara, Tero Pilvi, Tommi Suni, Alexey Veselov

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Original languageEnglish
Publication statusPublished - 14 May 2019
MoE publication typeNot Eligible
Event14th International conference on Films and Coatings 2019 - Saint-Petersburg state electrotechnical University "LETI" named after V. I. Ulyanov (Lenin), St. Petersburg, Russian Federation
Duration: 14 May 201916 May 2019
http://onlinereg.ru/site.php?go=294&lang=ENG

Conference

Conference14th International conference on Films and Coatings 2019
CountryRussian Federation
CitySt. Petersburg
Period14/05/1916/05/19
Internet address

Cite this

Ritasalo, R., Ylivaara, O. M. E., Pilvi, T., Suni, T., & Veselov, A. (2019). Stresses in ALD films: aiming for zero stress thin films. Abstract from 14th International conference on Films and Coatings 2019, St. Petersburg, Russian Federation.
Ritasalo, Riina ; Ylivaara, Oili M.E. ; Pilvi, Tero ; Suni, Tommi ; Veselov, Alexey. / Stresses in ALD films : aiming for zero stress thin films. Abstract from 14th International conference on Films and Coatings 2019, St. Petersburg, Russian Federation.
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title = "Stresses in ALD films: aiming for zero stress thin films",
author = "Riina Ritasalo and Ylivaara, {Oili M.E.} and Tero Pilvi and Tommi Suni and Alexey Veselov",
note = "Abstract and oral presentation based on the abstract; 14th International conference on Films and Coatings 2019 ; Conference date: 14-05-2019 Through 16-05-2019",
year = "2019",
month = "5",
day = "14",
language = "English",
url = "http://onlinereg.ru/site.php?go=294&lang=ENG",

}

Ritasalo, R, Ylivaara, OME, Pilvi, T, Suni, T & Veselov, A 2019, 'Stresses in ALD films: aiming for zero stress thin films' 14th International conference on Films and Coatings 2019, St. Petersburg, Russian Federation, 14/05/19 - 16/05/19, .

Stresses in ALD films : aiming for zero stress thin films. / Ritasalo, Riina; Ylivaara, Oili M.E.; Pilvi, Tero; Suni, Tommi; Veselov, Alexey.

2019. Abstract from 14th International conference on Films and Coatings 2019, St. Petersburg, Russian Federation.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

TY - CONF

T1 - Stresses in ALD films

T2 - aiming for zero stress thin films

AU - Ritasalo, Riina

AU - Ylivaara, Oili M.E.

AU - Pilvi, Tero

AU - Suni, Tommi

AU - Veselov, Alexey

N1 - Abstract and oral presentation based on the abstract

PY - 2019/5/14

Y1 - 2019/5/14

UR - http://onlinereg.ru/site.php?go=294&page=6759&lang=ENG

M3 - Conference Abstract

ER -

Ritasalo R, Ylivaara OME, Pilvi T, Suni T, Veselov A. Stresses in ALD films: aiming for zero stress thin films. 2019. Abstract from 14th International conference on Films and Coatings 2019, St. Petersburg, Russian Federation.