Stresses in ALD films: aiming for zero stress thin films

Riina Ritasalo, Oili M.E. Ylivaara, Tero Pilvi, Tommi Suni, Alexey Veselov

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Original languageEnglish
Publication statusPublished - 14 May 2019
MoE publication typeNot Eligible
Event14th International conference on Films and Coatings 2019 - Saint-Petersburg state electrotechnical University "LETI" named after V. I. Ulyanov (Lenin), St. Petersburg, Russian Federation
Duration: 14 May 201916 May 2019
http://onlinereg.ru/site.php?go=294&lang=ENG

Conference

Conference14th International conference on Films and Coatings 2019
CountryRussian Federation
CitySt. Petersburg
Period14/05/1916/05/19
Internet address

Keywords

  • OtaNano

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