Stresses in ALD films: Aiming for zero stress thin films

Riina Ritasalo, Oili Ylivaara, Tero Pilvi, Tommi Suni

    Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

    Fingerprint

    Dive into the research topics of 'Stresses in ALD films: Aiming for zero stress thin films'. Together they form a unique fingerprint.

    Keyphrases

    INIS

    Engineering

    Material Science