Abstract
| Original language | English |
|---|---|
| Pages (from-to) | 1703-1705 |
| Number of pages | 3 |
| Journal | Optics Letters |
| Volume | 37 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - 2012 |
| MoE publication type | A1 Journal article-refereed |
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Stroboscopic supercontinuum white-light interferometer for MEMS characterization. / Hanhijärvi, H. (Corresponding Author); Kassamakov, I.; Heikkinen, V.; Aaltonen, J.; Sainiemi, L.; Grigoras, Kestutis; Franssila, S.; Haeggström, E.
In: Optics Letters, Vol. 37, No. 10, 2012, p. 1703-1705.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - Stroboscopic supercontinuum white-light interferometer for MEMS characterization
AU - Hanhijärvi, H.
AU - Kassamakov, I.
AU - Heikkinen, V.
AU - Aaltonen, J.
AU - Sainiemi, L.
AU - Grigoras, Kestutis
AU - Franssila, S.
AU - Haeggström, E.
PY - 2012
Y1 - 2012
N2 - We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4 μm3 microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03 μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.
AB - We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4 μm3 microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03 μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.
U2 - 10.1364/OL.37.001703
DO - 10.1364/OL.37.001703
M3 - Article
VL - 37
SP - 1703
EP - 1705
JO - Optics Letters
JF - Optics Letters
SN - 0146-9592
IS - 10
ER -