Abstract
We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4 μm³ microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03 μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.
Original language | English |
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Pages (from-to) | 1703-1705 |
Journal | Optics Letters |
Volume | 37 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2012 |
MoE publication type | A1 Journal article-refereed |