Stroboscopic supercontinuum white-light interferometer for MEMS characterization

H. Hanhijärvi (Corresponding Author), I. Kassamakov, V. Heikkinen, J. Aaltonen, L. Sainiemi, Kestutis Grigoras, S. Franssila, E. Haeggström

Research output: Contribution to journalArticleScientificpeer-review

18 Citations (Scopus)

Abstract

We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4  μm3 microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03  μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.
Original languageEnglish
Pages (from-to)1703-1705
Number of pages3
JournalOptics Letters
Volume37
Issue number10
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

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microelectromechanical systems
light emitting diodes
interferometers
oscillations
frequency modulation
deflection
light sources
scanning
output
electric potential
profiles

Cite this

Hanhijärvi, H., Kassamakov, I., Heikkinen, V., Aaltonen, J., Sainiemi, L., Grigoras, K., ... Haeggström, E. (2012). Stroboscopic supercontinuum white-light interferometer for MEMS characterization. Optics Letters, 37(10), 1703-1705. https://doi.org/10.1364/OL.37.001703
Hanhijärvi, H. ; Kassamakov, I. ; Heikkinen, V. ; Aaltonen, J. ; Sainiemi, L. ; Grigoras, Kestutis ; Franssila, S. ; Haeggström, E. / Stroboscopic supercontinuum white-light interferometer for MEMS characterization. In: Optics Letters. 2012 ; Vol. 37, No. 10. pp. 1703-1705.
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abstract = "We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4  μm3 microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03  μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.",
author = "H. Hanhij{\"a}rvi and I. Kassamakov and V. Heikkinen and J. Aaltonen and L. Sainiemi and Kestutis Grigoras and S. Franssila and E. Haeggstr{\"o}m",
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Hanhijärvi, H, Kassamakov, I, Heikkinen, V, Aaltonen, J, Sainiemi, L, Grigoras, K, Franssila, S & Haeggström, E 2012, 'Stroboscopic supercontinuum white-light interferometer for MEMS characterization', Optics Letters, vol. 37, no. 10, pp. 1703-1705. https://doi.org/10.1364/OL.37.001703

Stroboscopic supercontinuum white-light interferometer for MEMS characterization. / Hanhijärvi, H. (Corresponding Author); Kassamakov, I.; Heikkinen, V.; Aaltonen, J.; Sainiemi, L.; Grigoras, Kestutis; Franssila, S.; Haeggström, E.

In: Optics Letters, Vol. 37, No. 10, 2012, p. 1703-1705.

Research output: Contribution to journalArticleScientificpeer-review

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T1 - Stroboscopic supercontinuum white-light interferometer for MEMS characterization

AU - Hanhijärvi, H.

AU - Kassamakov, I.

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AU - Sainiemi, L.

AU - Grigoras, Kestutis

AU - Franssila, S.

AU - Haeggström, E.

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AB - We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4  μm3 microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03  μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.

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Hanhijärvi H, Kassamakov I, Heikkinen V, Aaltonen J, Sainiemi L, Grigoras K et al. Stroboscopic supercontinuum white-light interferometer for MEMS characterization. Optics Letters. 2012;37(10):1703-1705. https://doi.org/10.1364/OL.37.001703