Stroboscopic supercontinuum white-light interferometer for MEMS characterization

H. Hanhijärvi; I. Kassamakov; V. Heikkinen; J. Aaltonen; L. Sainiemi; Kestutis Grigoras; S. Franssila; E. Haeggström

doi:10.1364/OL.37.001703

Stroboscopic supercontinuum white-light interferometer for MEMS characterization

H. Hanhijärvi (Corresponding Author), I. Kassamakov, V. Heikkinen, J. Aaltonen, L. Sainiemi, Kestutis Grigoras, S. Franssila, E. Haeggström

Research output: Contribution to journal › Article › Scientific › peer-review

19 Citations (Scopus)

Abstract

We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4 μm3 microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03 μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.

Original language	English
Pages (from-to)	1703-1705
Number of pages	3
Journal	Optics Letters
Volume	37
Issue number	10
DOIs	https://doi.org/10.1364/OL.37.001703
Publication status	Published - 2012
MoE publication type	A1 Journal article-refereed

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title = "Stroboscopic supercontinuum white-light interferometer for MEMS characterization",

abstract = "We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4 μm3 microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03 μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.",

author = "H. Hanhij{\"a}rvi and I. Kassamakov and V. Heikkinen and J. Aaltonen and L. Sainiemi and Kestutis Grigoras and S. Franssila and E. Haeggstr{\"o}m",

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language = "English",

volume = "37",

pages = "1703--1705",

journal = "Optics Letters",

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publisher = "Optical Society of America OSA",

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Stroboscopic supercontinuum white-light interferometer for MEMS characterization. / Hanhijärvi, H. (Corresponding Author); Kassamakov, I.; Heikkinen, V.; Aaltonen, J.; Sainiemi, L.; Grigoras, Kestutis; Franssila, S.; Haeggström, E.

In: Optics Letters, Vol. 37, No. 10, 2012, p. 1703-1705.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Stroboscopic supercontinuum white-light interferometer for MEMS characterization

AU - Hanhijärvi, H.

AU - Kassamakov, I.

AU - Heikkinen, V.

AU - Aaltonen, J.

AU - Sainiemi, L.

AU - Grigoras, Kestutis

AU - Franssila, S.

AU - Haeggström, E.

PY - 2012

Y1 - 2012

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AB - We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4 μm3 microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03 μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.

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DO - 10.1364/OL.37.001703

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