Stroboscopic supercontinuum white-light interferometer for MEMS characterization

H. Hanhijärvi (Corresponding Author), I. Kassamakov, V. Heikkinen, J. Aaltonen, L. Sainiemi, Kestutis Grigoras, S. Franssila, E. Haeggström

    Research output: Contribution to journalArticleScientificpeer-review

    19 Citations (Scopus)

    Abstract

    We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4  μm3 microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03  μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.
    Original languageEnglish
    Pages (from-to)1703-1705
    Number of pages3
    JournalOptics Letters
    Volume37
    Issue number10
    DOIs
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed

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    microelectromechanical systems
    light emitting diodes
    interferometers
    oscillations
    frequency modulation
    deflection
    light sources
    scanning
    output
    electric potential
    profiles

    Cite this

    Hanhijärvi, H., Kassamakov, I., Heikkinen, V., Aaltonen, J., Sainiemi, L., Grigoras, K., ... Haeggström, E. (2012). Stroboscopic supercontinuum white-light interferometer for MEMS characterization. Optics Letters, 37(10), 1703-1705. https://doi.org/10.1364/OL.37.001703
    Hanhijärvi, H. ; Kassamakov, I. ; Heikkinen, V. ; Aaltonen, J. ; Sainiemi, L. ; Grigoras, Kestutis ; Franssila, S. ; Haeggström, E. / Stroboscopic supercontinuum white-light interferometer for MEMS characterization. In: Optics Letters. 2012 ; Vol. 37, No. 10. pp. 1703-1705.
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    title = "Stroboscopic supercontinuum white-light interferometer for MEMS characterization",
    abstract = "We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4  μm3 microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03  μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.",
    author = "H. Hanhij{\"a}rvi and I. Kassamakov and V. Heikkinen and J. Aaltonen and L. Sainiemi and Kestutis Grigoras and S. Franssila and E. Haeggstr{\"o}m",
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    Hanhijärvi, H, Kassamakov, I, Heikkinen, V, Aaltonen, J, Sainiemi, L, Grigoras, K, Franssila, S & Haeggström, E 2012, 'Stroboscopic supercontinuum white-light interferometer for MEMS characterization', Optics Letters, vol. 37, no. 10, pp. 1703-1705. https://doi.org/10.1364/OL.37.001703

    Stroboscopic supercontinuum white-light interferometer for MEMS characterization. / Hanhijärvi, H. (Corresponding Author); Kassamakov, I.; Heikkinen, V.; Aaltonen, J.; Sainiemi, L.; Grigoras, Kestutis; Franssila, S.; Haeggström, E.

    In: Optics Letters, Vol. 37, No. 10, 2012, p. 1703-1705.

    Research output: Contribution to journalArticleScientificpeer-review

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    T1 - Stroboscopic supercontinuum white-light interferometer for MEMS characterization

    AU - Hanhijärvi, H.

    AU - Kassamakov, I.

    AU - Heikkinen, V.

    AU - Aaltonen, J.

    AU - Sainiemi, L.

    AU - Grigoras, Kestutis

    AU - Franssila, S.

    AU - Haeggström, E.

    PY - 2012

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    AB - We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4  μm3 microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03  μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.

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    Hanhijärvi H, Kassamakov I, Heikkinen V, Aaltonen J, Sainiemi L, Grigoras K et al. Stroboscopic supercontinuum white-light interferometer for MEMS characterization. Optics Letters. 2012;37(10):1703-1705. https://doi.org/10.1364/OL.37.001703