Stroboscopic supercontinuum white-light interferometer for MEMS characterization

H. Hanhijärvi (Corresponding Author), I. Kassamakov, V. Heikkinen, J. Aaltonen, L. Sainiemi, Kestutis Grigoras, S. Franssila, E. Haeggström

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    Abstract

    We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4  μm3 microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03  μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.
    Original languageEnglish
    Pages (from-to)1703-1705
    Number of pages3
    JournalOptics Letters
    Volume37
    Issue number10
    DOIs
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed

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  • Cite this

    Hanhijärvi, H., Kassamakov, I., Heikkinen, V., Aaltonen, J., Sainiemi, L., Grigoras, K., Franssila, S., & Haeggström, E. (2012). Stroboscopic supercontinuum white-light interferometer for MEMS characterization. Optics Letters, 37(10), 1703-1705. https://doi.org/10.1364/OL.37.001703