Stroboscopic supercontinuum white-light interferometer for MEMS characterization

Kalle Hanhijärvi; I. Kassamakov; V. Heikkinen; J. Aaltonen; L. Sainiemi; Kestutis Grigoras; S. Franssila; E. Hæggström

doi:10.1364/OL.37.001703

Stroboscopic supercontinuum white-light interferometer for MEMS characterization

Kalle Hanhijärvi^*, I. Kassamakov, V. Heikkinen, J. Aaltonen, L. Sainiemi, Kestutis Grigoras, S. Franssila, E. Hæggström

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

23 Citations (Scopus)

Abstract

We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4 µm³ microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03 µm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.

Original language	English
Pages (from-to)	1703-1705
Journal	Optics Letters
Volume	37
Issue number	10
DOIs	https://doi.org/10.1364/OL.37.001703
Publication status	Published - 2012
MoE publication type	A1 Journal article-refereed

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10.1364/OL.37.001703

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abstract = "We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4 µm³ microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03 µm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.",

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AU - Hanhijärvi, Kalle

AU - Kassamakov, I.

AU - Heikkinen, V.

AU - Aaltonen, J.

AU - Sainiemi, L.

AU - Grigoras, Kestutis

AU - Franssila, S.

AU - Hæggström, E.

PY - 2012

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N2 - We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4 µm³ microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03 µm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.

AB - We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4 µm³ microbridge driven with 0–6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03 µm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.

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DO - 10.1364/OL.37.001703

M3 - Article

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VL - 37

SP - 1703

EP - 1705

JO - Optics Letters

JF - Optics Letters

IS - 10

ER -

Stroboscopic supercontinuum white-light interferometer for MEMS characterization

Abstract

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