Structural properties of Ge-implanted Si1 − xGex layers

  • Z. Xia*
  • , EO O. Ristolainen
  • , H. Ronkainen
  • , J. Saarilahti
  • , K. Grahn
  • , J. Molarius
    • *Corresponding author for this work

    Research output: Contribution to journal › Article › Scientific › peer-review

    2 Citations (Scopus)

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    Keyphrases

    Material Science

    Engineering

    Chemistry