Study of processing parameters on the mechanical and compositional properties of plasma-enhanced atomic layer deposition aluminum nitride films

Alexander Pyymaki-Perros (Corresponding author), Oili Ylivaara, Xuwen Liu, Jaakko Julin, Timo Sajavaara, Saima Ali, Sakari Sintonen, Harri Lipsanen, Riikka L. Puurunen (Corresponding author)

    Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

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