We have demonstrated both rise and fall times below 1 μs with 10%-90% modulation in a silicon-on-insulator thermooptical Mach-Zehnder switch. The switch is based on 9-μm-thick and 10-μm-wide single-mode rib waveguides. Very fast switching was achieved by using a differential control method. The switch was driven with a digital signal processor accompanied by simple electronic circuitry.
- integrated optics
- optical switches
- optical waveguides
- silicon-on-insulator (SOI) technology
- thermo-optic (TO) effects