Sub-kHz traceable characterization of stroboscopic scanning white light interferometer

V. Heikkinen, I. Kassamakov, T. Paulin, A. Nolvi, J. Seppä, A. Lassila, E. Hæggström

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

Abstract

Scanning white light interferometry (SWLI) is an established methodology for non-destructive testing of MEMS/NEMS. In contrast to monochromatic interference microcopy SWLI can unambiguously resolve surfaces featuring tall vertical steps. Oscillating samples can be imaged using a stroboscopic SWLI (SSWLI) equipped with a pulsed light source. To measure static samples the lateral and vertical scales of the SSWLI can be calibrated using transfer standards with calibrated dimensions such as line scales, 2D gratings, gauge blocks, and step height standards. However, traceable dynamic characterization of SSWLI requires a transfer standard (TS) providing repeatable traceable periodic movement. A TS based on a piezo-scanned flexure guided stage with capacitive feedback was designed and manufactured. The trajectories of the stage motion for different amplitude and frequency settings were characterized to have 2 nm standard uncertainty. Characterization was made using a symmetric differential heterodyne laser interferometer (SDHLI). The TS was first used to characterize quasidynamic measurements across the vertical range of the SSWLI, 100 μm. Dynamic measurement properties of the SSWLI were then characterized using a sinusoidal vertical trajectory with 2 μm nominal amplitude and 50 Hz frequency. The motion amplitude of the TS, 2038 nm, measured with the SSWLI was 6 nm smaller than the amplitude measured with SDHLI. The repeatability of SSWLI expressed as experimental standard deviation of the mean was 8.8 nm. The maximum deviation in instantaneous displacement and oscillation velocity were 49 nm and 27 μm/s, respectively. A traceable method to characterize the capacity of the SSWLI to perform dynamic measurements at sub-kHz frequencies was demonstrated.

Original languageEnglish
Title of host publicationOptical Micro- and Nanometrology V
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Electronic)978-162841080-8
DOIs
Publication statusPublished - 2014
MoE publication typeA4 Article in a conference publication
EventOptical Micro- and Nanometrology V - Brussels, Belgium
Duration: 15 Apr 201417 Apr 2014

Publication series

SeriesProceedings of SPIE
Volume9132
ISSN0277-786X

Conference

ConferenceOptical Micro- and Nanometrology V
CountryBelgium
CityBrussels
Period15/04/1417/04/14

Fingerprint

Interferometer
Interferometers
Scanning
interferometers
scanning
Vertical
White Light Interferometry
Laser Interferometer
Heterodyne
Interferometry
interferometry
Gage blocks
Trajectories
trajectories
Trajectory
NEMS
Flexure
Motion
Lasers
flexing

Keywords

  • MEMS
  • NEMS
  • SSWLI
  • Traceability

Cite this

Heikkinen, V., Kassamakov, I., Paulin, T., Nolvi, A., Seppä, J., Lassila, A., & Hæggström, E. (2014). Sub-kHz traceable characterization of stroboscopic scanning white light interferometer. In Optical Micro- and Nanometrology V [913218] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 9132 https://doi.org/10.1117/12.2051622
Heikkinen, V. ; Kassamakov, I. ; Paulin, T. ; Nolvi, A. ; Seppä, J. ; Lassila, A. ; Hæggström, E. / Sub-kHz traceable characterization of stroboscopic scanning white light interferometer. Optical Micro- and Nanometrology V. International Society for Optics and Photonics SPIE, 2014. (Proceedings of SPIE, Vol. 9132).
@inproceedings{3c88371cb7664ddeb1c42142bf92b24b,
title = "Sub-kHz traceable characterization of stroboscopic scanning white light interferometer",
abstract = "Scanning white light interferometry (SWLI) is an established methodology for non-destructive testing of MEMS/NEMS. In contrast to monochromatic interference microcopy SWLI can unambiguously resolve surfaces featuring tall vertical steps. Oscillating samples can be imaged using a stroboscopic SWLI (SSWLI) equipped with a pulsed light source. To measure static samples the lateral and vertical scales of the SSWLI can be calibrated using transfer standards with calibrated dimensions such as line scales, 2D gratings, gauge blocks, and step height standards. However, traceable dynamic characterization of SSWLI requires a transfer standard (TS) providing repeatable traceable periodic movement. A TS based on a piezo-scanned flexure guided stage with capacitive feedback was designed and manufactured. The trajectories of the stage motion for different amplitude and frequency settings were characterized to have 2 nm standard uncertainty. Characterization was made using a symmetric differential heterodyne laser interferometer (SDHLI). The TS was first used to characterize quasidynamic measurements across the vertical range of the SSWLI, 100 μm. Dynamic measurement properties of the SSWLI were then characterized using a sinusoidal vertical trajectory with 2 μm nominal amplitude and 50 Hz frequency. The motion amplitude of the TS, 2038 nm, measured with the SSWLI was 6 nm smaller than the amplitude measured with SDHLI. The repeatability of SSWLI expressed as experimental standard deviation of the mean was 8.8 nm. The maximum deviation in instantaneous displacement and oscillation velocity were 49 nm and 27 μm/s, respectively. A traceable method to characterize the capacity of the SSWLI to perform dynamic measurements at sub-kHz frequencies was demonstrated.",
keywords = "MEMS, NEMS, SSWLI, Traceability",
author = "V. Heikkinen and I. Kassamakov and T. Paulin and A. Nolvi and J. Sepp{\"a} and A. Lassila and E. H{\ae}ggstr{\"o}m",
year = "2014",
doi = "10.1117/12.2051622",
language = "English",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
booktitle = "Optical Micro- and Nanometrology V",
address = "United States",

}

Heikkinen, V, Kassamakov, I, Paulin, T, Nolvi, A, Seppä, J, Lassila, A & Hæggström, E 2014, Sub-kHz traceable characterization of stroboscopic scanning white light interferometer. in Optical Micro- and Nanometrology V., 913218, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 9132, Optical Micro- and Nanometrology V, Brussels, Belgium, 15/04/14. https://doi.org/10.1117/12.2051622

Sub-kHz traceable characterization of stroboscopic scanning white light interferometer. / Heikkinen, V.; Kassamakov, I.; Paulin, T.; Nolvi, A.; Seppä, J.; Lassila, A.; Hæggström, E.

Optical Micro- and Nanometrology V. International Society for Optics and Photonics SPIE, 2014. 913218 (Proceedings of SPIE, Vol. 9132).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Sub-kHz traceable characterization of stroboscopic scanning white light interferometer

AU - Heikkinen, V.

AU - Kassamakov, I.

AU - Paulin, T.

AU - Nolvi, A.

AU - Seppä, J.

AU - Lassila, A.

AU - Hæggström, E.

PY - 2014

Y1 - 2014

N2 - Scanning white light interferometry (SWLI) is an established methodology for non-destructive testing of MEMS/NEMS. In contrast to monochromatic interference microcopy SWLI can unambiguously resolve surfaces featuring tall vertical steps. Oscillating samples can be imaged using a stroboscopic SWLI (SSWLI) equipped with a pulsed light source. To measure static samples the lateral and vertical scales of the SSWLI can be calibrated using transfer standards with calibrated dimensions such as line scales, 2D gratings, gauge blocks, and step height standards. However, traceable dynamic characterization of SSWLI requires a transfer standard (TS) providing repeatable traceable periodic movement. A TS based on a piezo-scanned flexure guided stage with capacitive feedback was designed and manufactured. The trajectories of the stage motion for different amplitude and frequency settings were characterized to have 2 nm standard uncertainty. Characterization was made using a symmetric differential heterodyne laser interferometer (SDHLI). The TS was first used to characterize quasidynamic measurements across the vertical range of the SSWLI, 100 μm. Dynamic measurement properties of the SSWLI were then characterized using a sinusoidal vertical trajectory with 2 μm nominal amplitude and 50 Hz frequency. The motion amplitude of the TS, 2038 nm, measured with the SSWLI was 6 nm smaller than the amplitude measured with SDHLI. The repeatability of SSWLI expressed as experimental standard deviation of the mean was 8.8 nm. The maximum deviation in instantaneous displacement and oscillation velocity were 49 nm and 27 μm/s, respectively. A traceable method to characterize the capacity of the SSWLI to perform dynamic measurements at sub-kHz frequencies was demonstrated.

AB - Scanning white light interferometry (SWLI) is an established methodology for non-destructive testing of MEMS/NEMS. In contrast to monochromatic interference microcopy SWLI can unambiguously resolve surfaces featuring tall vertical steps. Oscillating samples can be imaged using a stroboscopic SWLI (SSWLI) equipped with a pulsed light source. To measure static samples the lateral and vertical scales of the SSWLI can be calibrated using transfer standards with calibrated dimensions such as line scales, 2D gratings, gauge blocks, and step height standards. However, traceable dynamic characterization of SSWLI requires a transfer standard (TS) providing repeatable traceable periodic movement. A TS based on a piezo-scanned flexure guided stage with capacitive feedback was designed and manufactured. The trajectories of the stage motion for different amplitude and frequency settings were characterized to have 2 nm standard uncertainty. Characterization was made using a symmetric differential heterodyne laser interferometer (SDHLI). The TS was first used to characterize quasidynamic measurements across the vertical range of the SSWLI, 100 μm. Dynamic measurement properties of the SSWLI were then characterized using a sinusoidal vertical trajectory with 2 μm nominal amplitude and 50 Hz frequency. The motion amplitude of the TS, 2038 nm, measured with the SSWLI was 6 nm smaller than the amplitude measured with SDHLI. The repeatability of SSWLI expressed as experimental standard deviation of the mean was 8.8 nm. The maximum deviation in instantaneous displacement and oscillation velocity were 49 nm and 27 μm/s, respectively. A traceable method to characterize the capacity of the SSWLI to perform dynamic measurements at sub-kHz frequencies was demonstrated.

KW - MEMS

KW - NEMS

KW - SSWLI

KW - Traceability

UR - http://www.scopus.com/inward/record.url?scp=84902375472&partnerID=8YFLogxK

U2 - 10.1117/12.2051622

DO - 10.1117/12.2051622

M3 - Conference article in proceedings

AN - SCOPUS:84902375472

T3 - Proceedings of SPIE

BT - Optical Micro- and Nanometrology V

PB - International Society for Optics and Photonics SPIE

ER -

Heikkinen V, Kassamakov I, Paulin T, Nolvi A, Seppä J, Lassila A et al. Sub-kHz traceable characterization of stroboscopic scanning white light interferometer. In Optical Micro- and Nanometrology V. International Society for Optics and Photonics SPIE. 2014. 913218. (Proceedings of SPIE, Vol. 9132). https://doi.org/10.1117/12.2051622