Submillimeter-wave kinetic inductance bolometers on free-standing nanomembranes

Andrey Timofeev (Corresponding Author), Visa Vesterinen, Panu Helistö, Leif Grönberg, Juha Hassel, A Luukanen

    Research output: Contribution to journalArticleScientificpeer-review

    19 Citations (Scopus)


    We introduce a microwave submillimeter-wave detector based on an integrated micromesh absorber and superconducting kinetic inductance thermometer on a through-wafer released sub-micron thick membrane. Equilibrium operation achieved by thermal isolation through the membrane geometry enables operation at elevated thermal bath temperatures of 5-10 K. The bolometer operates in a phonon-noise limited regime with a measured noise equivalent temperature difference of below 10 mK at 1 s integration time, which is sufficient for radiometric imaging in terrestrial systems. We also measured and analyzed the bolometer frequency response in the band 0.1-1.4 THz. Performance improvements through further dimensional scale-down and temperature dependency are discussed
    Original languageEnglish
    Number of pages7
    JournalSuperconductor Science and Technology
    Issue number2
    Publication statusPublished - 2014
    MoE publication typeA1 Journal article-refereed


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