Substrate-patterning techniques for nitride growth

Sami Suihkonen; Muhammad Ali; Olli Svensk; Sakari Sintonen; Markku Sopanen; Harri Lipsanen; Pekka T. Törmä

doi:10.1117/2.1201010.003279

Substrate-patterning techniques for nitride growth

Sami Suihkonen, Muhammad Ali, Olli Svensk, Sakari Sintonen, Markku Sopanen, Harri Lipsanen, Pekka T. Törmä

Not published at VTT

Research output: Other contribution › Blog/Web article › Professional

Abstract

Enhanced control over substrate patterning leads to improvements in material quality and light extraction in nitride materials and LEDs.

Original language	English
Type	Featured News from SPIE
Publisher	International Society for Optics and Photonics SPIE
DOIs	https://doi.org/10.1117/2.1201010.003279
Publication status	Published - Dec 2010
MoE publication type	Not Eligible

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title = "Substrate-patterning techniques for nitride growth",

abstract = "Enhanced control over substrate patterning leads to improvements in material quality and light extraction in nitride materials and LEDs.",

author = "Sami Suihkonen and Muhammad Ali and Olli Svensk and Sakari Sintonen and Markku Sopanen and Harri Lipsanen and T{\"o}rm{\"a}, {Pekka T.}",

year = "2010",

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doi = "10.1117/2.1201010.003279",

language = "English",

publisher = "International Society for Optics and Photonics SPIE",

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AU - Suihkonen, Sami

AU - Ali, Muhammad

AU - Svensk, Olli

AU - Sintonen, Sakari

AU - Sopanen, Markku

AU - Lipsanen, Harri

AU - Törmä, Pekka T.

PY - 2010/12

Y1 - 2010/12

N2 - Enhanced control over substrate patterning leads to improvements in material quality and light extraction in nitride materials and LEDs.

AB - Enhanced control over substrate patterning leads to improvements in material quality and light extraction in nitride materials and LEDs.

U2 - 10.1117/2.1201010.003279

DO - 10.1117/2.1201010.003279

M3 - Blog/Web article

PB - International Society for Optics and Photonics SPIE

ER -

Substrate-patterning techniques for nitride growth

Abstract

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