Suitability of new polymer materials with adjustable glass temperature for nano-imprinting

Karl Pfeiffer, G. Bleidiessel, G. Gruetzner, H. Shultz, T. Hoffmann, H.-C. Scheer, C. Sotomayor-Torres, Jouni Ahopelto

    Research output: Contribution to journalArticleScientificpeer-review

    22 Citations (Scopus)

    Abstract

    A new class of copolymers potentially suitable for an imprint process is investigated. They are composed of methyl-methacrylate and a methacrylic acid, where the acid component increases the glass temperature and thus the thermal stability. The results obtained are compared to previous experiments with a methyl/butyl acrylate and the suitability for an imprint process is discussed. A modified processing sequence is proposed, where pressure is applied during the heating phase, resulting in superior imprint quality of, for example, periodic patterns.
    Original languageEnglish
    Pages (from-to)431-434
    Number of pages4
    JournalMicroelectronic Engineering
    Volume46
    Issue number1-4
    DOIs
    Publication statusPublished - 1999
    MoE publication typeA1 Journal article-refereed

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  • Cite this

    Pfeiffer, K., Bleidiessel, G., Gruetzner, G., Shultz, H., Hoffmann, T., Scheer, H-C., Sotomayor-Torres, C., & Ahopelto, J. (1999). Suitability of new polymer materials with adjustable glass temperature for nano-imprinting. Microelectronic Engineering, 46(1-4), 431-434. https://doi.org/10.1016/S0167-9317(99)00126-4