A new class of copolymers potentially suitable for an imprint process is investigated. They are composed of methyl-methacrylate and a methacrylic acid, where the acid component increases the glass temperature and thus the thermal stability. The results obtained are compared to previous experiments with a methyl/butyl acrylate and the suitability for an imprint process is discussed. A modified processing sequence is proposed, where pressure is applied during the heating phase, resulting in superior imprint quality of, for example, periodic patterns.
Pfeiffer, K., Bleidiessel, G., Gruetzner, G., Shultz, H., Hoffmann, T., Scheer, H-C., Sotomayor-Torres, C., & Ahopelto, J. (1999). Suitability of new polymer materials with adjustable glass temperature for nano-imprinting. Microelectronic Engineering, 46(1-4), 431-434. https://doi.org/10.1016/S0167-9317(99)00126-4