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Superconducting device

Research output: PatentPatent

Abstract

According to an example aspect of the present invention, there is provided a superconducting device comprising a silicon substrate (101), a superconducting layer (110) directly on a first face (101a) of the silicon substrate (101), the superconducting layer (110) covering a part, but not all, of the first face (101a) of the silicon substrate (101), and a silicon nitride layer (109) directly covering at least one part of the first face (101a) of the silicon substrate (101) which is not covered by the superconducting layer (110).

Patent family as of 14.7.2026
AU2024275160 AA, AU2024275160 BB, CA3293169 AA, EP4706354 A1, FI131716 B, FI20235579 A, WO24240987 A1
Original languageEnglish
Patent numberFI 131716 B1
IPCH01L25/065
Priority date24/05/23
Filing date24/05/23
Publication statusPublished - 13 Oct 2025
MoE publication typeH1 Granted patent

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