Superconducting thermal detector (bolometer) of terahertz (sub-millimeter wave) radiation

Andrey Timofeev (Inventor), Juha Hassel (Inventor), Arttu Luukanen (Inventor), Panu Helistö (Inventor), Leif Grönberg (Inventor)

Research output: PatentPatent


A superconducting thermal detector (bolometer) of THz (sub-millimeter) wave radiation based on sensing the change in the amplitude or phase of a resonator circuit, consisting of a capacitor (Csh) and a superconducting temperature dependent inductor where the said inductor is thermally isolated from the heat bath (chip substrate) by micro-suspensions. The bolometer design includes a thin film inductor located on the membrane, a single or/and multi-layered thin film capacitor, and a thin film absorber of incoming radiation. The bolometer design can also include a lithographic antenna with antenna termination and/or a back reflector beneath the membrane for optimal wavelength detection by the resonance circuit. The superconducting thermal detector (bolometer) and arrays of these detectors operate in a temperature range from 1 Kelvin to 10 Kelvin.

Patent family as of 22.10.2021

EP2965054 A1 20160113 EP20140719807 20140304
US10145743 BB 20181204 US20140773359 20140304   
US2016018267 AA 20160121 US20140773359 20140304     
WO14135749 A1 20140912 WO2014FI50158 20140304

Link to current patent family on right 

Original languageEnglish
Patent numberUS2016018267
IPCH01L 37/ 00 A I
Priority date4/03/14
Publication statusPublished - 21 Jan 2016
MoE publication typeH1 Granted patent


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