Superconducting TiN through-silicon-vias for quantum technology
- Kestutis Grigoras*
- , Slawomir Simbierowicz
- , Leif Grönberg
- , Joonas Govenius
- , Visa Vesterinen
- , Mika Prunnila
- , Juha Hassel
*Corresponding author for this work
- IQM Finland Oy
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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