Surface acoustic wave devices on AlN/3C-SiC/Si multilayer structures

Chih-Ming Lin, Yung-Yu Chen, Valery V. Felmetsger, Wei-Cheng Lien, Tommi Riekkinen, Debbie G. Senesky, Albert P. Pisano

Research output: Contribution to journalArticleScientificpeer-review

70 Citations (Scopus)

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Physics

Material Science

Engineering