Surface and bulk micromachining techniques for lumped components filters manufacturing

Tauno Vähä-Heikkilä, F. Giacomozzi, B. Margesin, I. Petrini, D. Vasilache, D. Neculoiu, C. Buiculescu, A. Müller, G. Konstantinidis, T. Kostopoulos, Y. Psychias

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Abstract

The paper presents a technology based on bulk and surface micromachining to manufacture lumped elements (capacitors and inductors) based low pass and high pass filter structures, having membrane supported spiral inductors. Test low pass and high pass filter structures are manufactured using silicon as well as GaAs micromachining. These technologies will be also useful in the manufacturing of reconfigurable membrane supported filters for millimeter wave applications.
Original languageEnglish
Title of host publicationMEMS technologies for RF and millimeter wave circuits
PublisherEditura Academiei Române
Pages210-215
ISBN (Print)978-973-27-1364-8, 973-27-1364-X
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
Event6th International Workshop MEMSWAVE 2005 - Lausanne, Switzerland
Duration: 23 Jun 200524 Jun 2005
Conference number: 6

Publication series

SeriesSeries in Micro and Nanoengineering
Volume8
ISSN2067-9572

Conference

Conference6th International Workshop MEMSWAVE 2005
Abbreviated titleMEMSWAVE 2005
CountrySwitzerland
CityLausanne
Period23/06/0524/06/05

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Keywords

  • micromachining
  • surface micromachining
  • bulk micromachining
  • MEMS
  • inductor
  • filter

Cite this

Vähä-Heikkilä, T., Giacomozzi, F., Margesin, B., Petrini, I., Vasilache, D., Neculoiu, D., Buiculescu, C., Müller, A., Konstantinidis, G., Kostopoulos, T., & Psychias, Y. (2005). Surface and bulk micromachining techniques for lumped components filters manufacturing. In MEMS technologies for RF and millimeter wave circuits (pp. 210-215). Editura Academiei Române. Series in Micro and Nanoengineering, Vol.. 8