Surface and bulk micromachining techniques for lumped components filters manufacturing

Tauno Vähä-Heikkilä, F. Giacomozzi, B. Margesin, I. Petrini, D. Vasilache, D. Neculoiu, C. Buiculescu, A. Müller, G. Konstantinidis, T. Kostopoulos, Y. Psychias

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review


    The paper presents a technology based on bulk and surface micromachining to manufacture lumped elements (capacitors and inductors) based low pass and high pass filter structures, having membrane supported spiral inductors. Test low pass and high pass filter structures are manufactured using silicon as well as GaAs micromachining. These technologies will be also useful in the manufacturing of reconfigurable membrane supported filters for millimeter wave applications.
    Original languageEnglish
    Title of host publicationMEMS technologies for RF and millimeter wave circuits
    PublisherEditura Academiei Române
    ISBN (Print)978-973-27-1364-8, 973-27-1364-X
    Publication statusPublished - 2005
    MoE publication typeA4 Article in a conference publication
    Event6th International Workshop MEMSWAVE 2005 - Lausanne, Switzerland
    Duration: 23 Jun 200524 Jun 2005
    Conference number: 6

    Publication series

    SeriesSeries in Micro and Nanoengineering


    Conference6th International Workshop MEMSWAVE 2005
    Abbreviated titleMEMSWAVE 2005


    • micromachining
    • surface micromachining
    • bulk micromachining
    • MEMS
    • inductor
    • filter


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