Surface and bulk micromachining techniques for lumped components filters manufacturing

Tauno Vähä-Heikkilä; F. Giacomozzi; B. Margesin; I. Petrini; D. Vasilache; D. Neculoiu; C. Buiculescu; A. Müller; G. Konstantinidis; T. Kostopoulos; Y. Psychias

Surface and bulk micromachining techniques for lumped components filters manufacturing

Tauno Vähä-Heikkilä, F. Giacomozzi, B. Margesin, I. Petrini, D. Vasilache, D. Neculoiu, C. Buiculescu, A. Müller, G. Konstantinidis, T. Kostopoulos, Y. Psychias

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

The paper presents a technology based on bulk and surface micromachining to manufacture lumped elements (capacitors and inductors) based low pass and high pass filter structures, having membrane supported spiral inductors. Test low pass and high pass filter structures are manufactured using silicon as well as GaAs micromachining. These technologies will be also useful in the manufacturing of reconfigurable membrane supported filters for millimeter wave applications.

Original language	English
Title of host publication	MEMS technologies for RF and millimeter wave circuits
Publisher	Editura Academiei Române
Pages	210-215
ISBN (Print)	978-973-27-1364-8, 973-27-1364-X
Publication status	Published - 2005
MoE publication type	A4 Article in a conference publication
Event	6th International Workshop MEMSWAVE 2005 - Lausanne, Switzerland Duration: 23 Jun 2005 → 24 Jun 2005 Conference number: 6

Publication series

Series	Series in Micro and Nanoengineering
Volume	8
ISSN	2067-9572

Conference

Conference	6th International Workshop MEMSWAVE 2005
Abbreviated title	MEMSWAVE 2005
Country/Territory	Switzerland
City	Lausanne
Period	23/06/05 → 24/06/05

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

micromachining
surface micromachining
bulk micromachining
MEMS
inductor
filter

Cite this

Vähä-Heikkilä, T., Giacomozzi, F., Margesin, B., Petrini, I., Vasilache, D., Neculoiu, D., Buiculescu, C., Müller, A., Konstantinidis, G., Kostopoulos, T., & Psychias, Y. (2005). Surface and bulk micromachining techniques for lumped components filters manufacturing. In MEMS technologies for RF and millimeter wave circuits (pp. 210-215). Editura Academiei Române.

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title = "Surface and bulk micromachining techniques for lumped components filters manufacturing",

abstract = "The paper presents a technology based on bulk and surface micromachining to manufacture lumped elements (capacitors and inductors) based low pass and high pass filter structures, having membrane supported spiral inductors. Test low pass and high pass filter structures are manufactured using silicon as well as GaAs micromachining. These technologies will be also useful in the manufacturing of reconfigurable membrane supported filters for millimeter wave applications.",

keywords = "micromachining, surface micromachining, bulk micromachining, MEMS, inductor, filter",

author = "Tauno V{\"a}h{\"a}-Heikkil{\"a} and F. Giacomozzi and B. Margesin and I. Petrini and D. Vasilache and D. Neculoiu and C. Buiculescu and A. M{\"u}ller and G. Konstantinidis and T. Kostopoulos and Y. Psychias",

year = "2005",

language = "English",

isbn = "978-973-27-1364-8",

series = "Series in Micro and Nanoengineering",

publisher = "Editura Academiei Rom{\^a}ne",

pages = "210--215",

booktitle = "MEMS technologies for RF and millimeter wave circuits",

address = "Romania",

note = "6th International Workshop MEMSWAVE 2005, MEMSWAVE 2005 ; Conference date: 23-06-2005 Through 24-06-2005",

}

Vähä-Heikkilä, T, Giacomozzi, F, Margesin, B, Petrini, I, Vasilache, D, Neculoiu, D, Buiculescu, C, Müller, A, Konstantinidis, G, Kostopoulos, T & Psychias, Y 2005, Surface and bulk micromachining techniques for lumped components filters manufacturing. in MEMS technologies for RF and millimeter wave circuits. Editura Academiei Române, Series in Micro and Nanoengineering, vol. 8, pp. 210-215, 6th International Workshop MEMSWAVE 2005, Lausanne, Switzerland, 23/06/05.

Surface and bulk micromachining techniques for lumped components filters manufacturing. / Vähä-Heikkilä, Tauno; Giacomozzi, F.; Margesin, B. et al.
MEMS technologies for RF and millimeter wave circuits. Editura Academiei Române, 2005. p. 210-215 (Series in Micro and Nanoengineering, Vol. 8).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Surface and bulk micromachining techniques for lumped components filters manufacturing

AU - Vähä-Heikkilä, Tauno

AU - Giacomozzi, F.

AU - Margesin, B.

AU - Petrini, I.

AU - Vasilache, D.

AU - Neculoiu, D.

AU - Buiculescu, C.

AU - Müller, A.

AU - Konstantinidis, G.

AU - Kostopoulos, T.

AU - Psychias, Y.

N1 - Conference code: 6

PY - 2005

Y1 - 2005

N2 - The paper presents a technology based on bulk and surface micromachining to manufacture lumped elements (capacitors and inductors) based low pass and high pass filter structures, having membrane supported spiral inductors. Test low pass and high pass filter structures are manufactured using silicon as well as GaAs micromachining. These technologies will be also useful in the manufacturing of reconfigurable membrane supported filters for millimeter wave applications.

AB - The paper presents a technology based on bulk and surface micromachining to manufacture lumped elements (capacitors and inductors) based low pass and high pass filter structures, having membrane supported spiral inductors. Test low pass and high pass filter structures are manufactured using silicon as well as GaAs micromachining. These technologies will be also useful in the manufacturing of reconfigurable membrane supported filters for millimeter wave applications.

KW - micromachining

KW - surface micromachining

KW - bulk micromachining

KW - MEMS

KW - inductor

KW - filter

M3 - Conference article in proceedings

SN - 978-973-27-1364-8

SN - 973-27-1364-X

T3 - Series in Micro and Nanoengineering

SP - 210

EP - 215

BT - MEMS technologies for RF and millimeter wave circuits

PB - Editura Academiei Române

T2 - 6th International Workshop MEMSWAVE 2005

Y2 - 23 June 2005 through 24 June 2005

ER -

Surface and bulk micromachining techniques for lumped components filters manufacturing

Abstract

Publication series

Conference

UN SDGs

Keywords

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Cite this