Surface and bulk micromachining techniques for lumped components filters manufacturing

Tauno Vähä-Heikkilä, F. Giacomozzi, B. Margesin, I. Petrini, D. Vasilache, D. Neculoiu, C. Buiculescu, A. Müller, G. Konstantinidis, T. Kostopoulos, Y. Psychias

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Fingerprint

    Dive into the research topics of 'Surface and bulk micromachining techniques for lumped components filters manufacturing'. Together they form a unique fingerprint.

    Physics & Astronomy