Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

Chemistry

• Atomic Layer Epitaxy 100%
• Surface Chemistry 52%
• Deposition Process 43%
• Procedure 17%
• Water Type 17%
• Chemical Reaction 13%
• Application 8%
• Saturation 8%
• Chemical Kinetics Characteristics 8%
• Deposition Technique 4%
• Surface Area 4%
• Inorganic Material 4%
• Monolayer 4%
• Reaction Temperature 4%
• Chemistry 4%
• Number 4%
• Thickness 4%

Material Science

• Monolayers 4%
• Material 4%
• Growth (Materials) 4%