Surface chemistry of atomic layer deposition: Mechanisms and conformality

Riikka Puurunen

Research output: Contribution to conferenceConference AbstractScientific

Original languageEnglish
Publication statusPublished - 2015
Event98th Canadian Chemistry Conference and Exhibition, CSC 2015 - Ottawa, Canada
Duration: 13 Jun 201517 Jun 2015

Conference

Conference98th Canadian Chemistry Conference and Exhibition, CSC 2015
Abbreviated titleCSC 2015
CountryCanada
CityOttawa
Period13/06/1517/06/15

Cite this

Puurunen, R. (2015). Surface chemistry of atomic layer deposition: Mechanisms and conformality. Abstract from 98th Canadian Chemistry Conference and Exhibition, CSC 2015, Ottawa, Canada. http://abstracts.csc2015.ca/00000609.htm