Surface chemistry of atomic layer deposition

Mechanisms and conformality

Riikka Puurunen

Research output: Contribution to conferenceConference AbstractScientific

Original languageEnglish
Publication statusPublished - 2015
Event98th Canadian Chemistry Conference and Exhibition, CSC 2015 - Ottawa, Canada
Duration: 13 Jun 201517 Jun 2015

Conference

Conference98th Canadian Chemistry Conference and Exhibition, CSC 2015
Abbreviated titleCSC 2015
CountryCanada
CityOttawa
Period13/06/1517/06/15

Cite this

Puurunen, R. (2015). Surface chemistry of atomic layer deposition: Mechanisms and conformality. Abstract from 98th Canadian Chemistry Conference and Exhibition, CSC 2015, Ottawa, Canada.
Puurunen, Riikka. / Surface chemistry of atomic layer deposition : Mechanisms and conformality. Abstract from 98th Canadian Chemistry Conference and Exhibition, CSC 2015, Ottawa, Canada.
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title = "Surface chemistry of atomic layer deposition: Mechanisms and conformality",
author = "Riikka Puurunen",
note = "Project code: 102086 ; 98th Canadian Chemistry Conference and Exhibition, CSC 2015, CSC 2015 ; Conference date: 13-06-2015 Through 17-06-2015",
year = "2015",
language = "English",

}

Puurunen, R 2015, 'Surface chemistry of atomic layer deposition: Mechanisms and conformality' 98th Canadian Chemistry Conference and Exhibition, CSC 2015, Ottawa, Canada, 13/06/15 - 17/06/15, .

Surface chemistry of atomic layer deposition : Mechanisms and conformality. / Puurunen, Riikka.

2015. Abstract from 98th Canadian Chemistry Conference and Exhibition, CSC 2015, Ottawa, Canada.

Research output: Contribution to conferenceConference AbstractScientific

TY - CONF

T1 - Surface chemistry of atomic layer deposition

T2 - Mechanisms and conformality

AU - Puurunen, Riikka

N1 - Project code: 102086

PY - 2015

Y1 - 2015

M3 - Conference Abstract

ER -

Puurunen R. Surface chemistry of atomic layer deposition: Mechanisms and conformality. 2015. Abstract from 98th Canadian Chemistry Conference and Exhibition, CSC 2015, Ottawa, Canada.