Surface chemistry of atomic layer deposition: Mechanisms and conformality

Riikka Puurunen

Research output: Contribution to conference › Conference Abstract › Scientific

Original language	English
Publication status	Published - 2015
Event	98th Canadian Chemistry Conference and Exhibition, CSC 2015 - Ottawa, Canada Duration: 13 Jun 2015 → 17 Jun 2015

Conference	98th Canadian Chemistry Conference and Exhibition, CSC 2015
Abbreviated title	CSC 2015
Country/Territory	Canada
City	Ottawa
Period	13/06/15 → 17/06/15

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