Surface chemistry of atomic layer deposition: Mechanisms and conformality

Riikka Puurunen

Research output: Contribution to conferenceConference AbstractScientific

Original languageEnglish
Publication statusPublished - 2015
Event98th Canadian Chemistry Conference and Exhibition, CSC 2015 - Ottawa, Canada
Duration: 13 Jun 201517 Jun 2015

Conference

Conference98th Canadian Chemistry Conference and Exhibition, CSC 2015
Abbreviated titleCSC 2015
CountryCanada
CityOttawa
Period13/06/1517/06/15

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