| Original language | English |
|---|---|
| Publication status | Published - 2015 |
| Event | 98th Canadian Chemistry Conference and Exhibition, CSC 2015 - Ottawa, Canada Duration: 13 Jun 2015 → 17 Jun 2015 |
Conference
| Conference | 98th Canadian Chemistry Conference and Exhibition, CSC 2015 |
|---|---|
| Abbreviated title | CSC 2015 |
| Country | Canada |
| City | Ottawa |
| Period | 13/06/15 → 17/06/15 |
Cite this
Puurunen, R. (2015). Surface chemistry of atomic layer deposition: Mechanisms and conformality. Abstract from 98th Canadian Chemistry Conference and Exhibition, CSC 2015, Ottawa, Canada.
@conference{3a17582f87634cb8ab8a139b8af9fe8f,
title = "Surface chemistry of atomic layer deposition: Mechanisms and conformality",
author = "Riikka Puurunen",
note = "Project code: 102086 ; 98th Canadian Chemistry Conference and Exhibition, CSC 2015, CSC 2015 ; Conference date: 13-06-2015 Through 17-06-2015",
year = "2015",
language = "English",
}
Puurunen, R 2015, 'Surface chemistry of atomic layer deposition: Mechanisms and conformality', 98th Canadian Chemistry Conference and Exhibition, CSC 2015, Ottawa, Canada, 13/06/15 - 17/06/15.
Surface chemistry of atomic layer deposition : Mechanisms and conformality. / Puurunen, Riikka.
2015. Abstract from 98th Canadian Chemistry Conference and Exhibition, CSC 2015, Ottawa, Canada.Research output: Contribution to conference › Conference Abstract › Scientific
TY - CONF
T1 - Surface chemistry of atomic layer deposition
T2 - Mechanisms and conformality
AU - Puurunen, Riikka
N1 - Project code: 102086
PY - 2015
Y1 - 2015
M3 - Conference Abstract
ER -
Puurunen R. Surface chemistry of atomic layer deposition: Mechanisms and conformality. 2015. Abstract from 98th Canadian Chemistry Conference and Exhibition, CSC 2015, Ottawa, Canada.