Surface chemistry of atomic layer deposition: Mechanisms and conformality

Riikka Puurunen

Research output: Contribution to conference › Conference Abstract › Scientific

Original languageEnglish
Publication statusPublished - 2015
Event98th Canadian Chemistry Conference and Exhibition, CSC 2015 - Ottawa, Canada
Duration: 13 Jun 2015 → 17 Jun 2015

Conference

Conference98th Canadian Chemistry Conference and Exhibition, CSC 2015
Abbreviated titleCSC 2015
CountryCanada
CityOttawa
Period13/06/15 → 17/06/15

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Cite this

Puurunen, R. (2015). Surface chemistry of atomic layer deposition: Mechanisms and conformality. Abstract from 98th Canadian Chemistry Conference and Exhibition, CSC 2015, Ottawa, Canada. http://abstracts.csc2015.ca/00000609.htm