Surface-micromachined silicon air-gap Bragg reflector for thermal infrared

Keyphrases

• Thermal Infrared 100%
• Air Gap 100%
• Surface Micromachining 100%
• Bragg Reflector 100%
• Poly-Si 100%
• Si Layer 50%
• Fourier Transform Infrared Spectroscopy (FT-IR) 25%
• Machining Process 25%
• Reflectance Spectra 25%
• Design Parameters 25%
• Low Pressure 25%
• MEMS-based 25%
• Silica 25%
• Mechanical Response 25%
• Scanning Electron Microscope Imaging 25%
• Scanning Electron Microscope 25%
• Sacrificial Layer 25%
• Process Flow 25%
• Model Fitting 25%
• Chemical Vapor 25%
• IR Data 25%
• Infrared Wavelength 25%
• Distributed Bragg Reflector 25%
• Microscope Measurement 25%
• Stylus Profilometer 25%
• Qualitative Estimation 25%
• Mutual Distance 25%
• Fourier-transform IR Spectroscopy 25%
• Layer Thickness Measurement 25%
• Local Points 25%
• Point Loading 25%

INIS

• surfaces 100%
• silicon 100%
• air 100%
• mirrors 100%
• layers 57%
• thickness 28%
• design 28%
• substrates 28%
• scanning electron microscopy 28%
• fourier transformation 28%
• comparative evaluations 14%
• density 14%
• data 14%
• chemical vapor deposition 14%
• processing 14%
• one-dimensional calculations 14%
• loading 14%
• wavelengths 14%
• spectra 14%
• distance 14%
• machining 14%
• topography 14%
• low pressure 14%
• computer simulation 14%
• infrared spectra 14%
• anchoring 14%

Engineering

• Bragg Cell 100%
• Polysilicon 100%
• Scanning Electron Microscope 50%
• Fourier Transform 50%
• Design Parameter 25%
• Model Parameter 25%
• One Dimensional 25%
• Layer Thickness 25%
• Mechanical Response 25%
• Surface Micro-Machining 25%
• Process Flow 25%
• Mm Diameter 25%
• Fit Model 25%
• Loading Point 25%
• Microelectromechanical System 25%
• Reflectance Spectrum 25%
• Silicon Dioxide 25%
• Reflectance 25%