@inproceedings{698a1642b5b447938246a2081c266476,
title = "Surface planarisation of LTCC for high performance thin-film applications",
keywords = "LTCC, surface, lapping, polishing",
author = "Jarkko Tuominen and Kari Kautio and Manu Lahdes and Kari R{\"o}nk{\"a} and Tuomo Jaakola and Jaakko Lenkkeri",
year = "2006",
language = "English",
isbn = "951-98002-9-8",
pages = "166--170",
booktitle = "IMAPS Nordic Annual Conference",
publisher = "IMAPS Nordic",
address = "Finland",
note = "IMAPS Nordic Annual Conference 2006 ; Conference date: 17-09-2006 Through 19-09-2006",
}