Surface planarisation of LTCC for high performance thin-film applications

Jarkko Tuominen, Kari Kautio, Manu Lahdes, Kari Rönkä, Tuomo Jaakola, Jaakko Lenkkeri

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Original language	English
Title of host publication	IMAPS Nordic Annual Conference
Publisher	IMAPS Nordic
Pages	166-170
ISBN (Print)	951-98002-9-8
Publication status	Published - 2006
MoE publication type	B3 Non-refereed article in conference proceedings
Event	IMAPS Nordic Annual Conference 2006 - Göteborg, Sweden Duration: 17 Sept 2006 → 19 Sept 2006

Conference	IMAPS Nordic Annual Conference 2006
Country/Territory	Sweden
City	Göteborg
Period	17/09/06 → 19/09/06

Keywords

@inproceedings{698a1642b5b447938246a2081c266476,

title = "Surface planarisation of LTCC for high performance thin-film applications",

keywords = "LTCC, surface, lapping, polishing",

author = "Jarkko Tuominen and Kari Kautio and Manu Lahdes and Kari R{\"o}nk{\"a} and Tuomo Jaakola and Jaakko Lenkkeri",

year = "2006",

language = "English",

isbn = "951-98002-9-8",

pages = "166--170",

booktitle = "IMAPS Nordic Annual Conference",

publisher = "IMAPS Nordic",

address = "Finland",

note = "IMAPS Nordic Annual Conference 2006 ; Conference date: 17-09-2006 Through 19-09-2006",

}

TY - GEN

T1 - Surface planarisation of LTCC for high performance thin-film applications

AU - Tuominen, Jarkko

AU - Kautio, Kari

AU - Lahdes, Manu

AU - Rönkä, Kari

AU - Jaakola, Tuomo

AU - Lenkkeri, Jaakko

PY - 2006

Y1 - 2006

KW - LTCC

KW - surface

KW - lapping

KW - polishing

M3 - Conference article in proceedings

SN - 951-98002-9-8

SP - 166

EP - 170

BT - IMAPS Nordic Annual Conference

PB - IMAPS Nordic

T2 - IMAPS Nordic Annual Conference 2006

Y2 - 17 September 2006 through 19 September 2006

ER -