Surface planarisation of LTCC for high performance thin-film applications

Jarkko Tuominen, Kari Kautio, Manu Lahdes, Kari Rönkä, Tuomo Jaakola, Jaakko Lenkkeri

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

4 Citations (Scopus)
Original languageEnglish
Title of host publicationIMAPS Nordic Annual Conference
PublisherIMAPS Nordic
Pages166-170
ISBN (Print)951-98002-9-8
Publication statusPublished - 2006
MoE publication typeB3 Non-refereed article in conference proceedings
EventIMAPS Nordic Annual Conference 2006 - Göteborg, Sweden
Duration: 17 Sep 200619 Sep 2006

Conference

ConferenceIMAPS Nordic Annual Conference 2006
Country/TerritorySweden
CityGöteborg
Period17/09/0619/09/06

Keywords

  • LTCC
  • surface
  • lapping
  • polishing

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