Surface planarisation of LTCC for high performance thin-film applications

Jarkko Tuominen, Kari Kautio, Manu Lahdes, Kari Rönkä, Tuomo Jaakola, Jaakko Lenkkeri

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

4 Citations (Scopus)
Original languageEnglish
Title of host publicationIMAPS Nordic Annual Conference
PublisherIMAPS Nordic
Pages166-170
ISBN (Print)951-98002-9-8
Publication statusPublished - 2006
MoE publication typeB3 Non-refereed article in conference proceedings
EventIMAPS Nordic Annual Conference 2006 - Göteborg, Sweden
Duration: 17 Sep 200619 Sep 2006

Conference

ConferenceIMAPS Nordic Annual Conference 2006
CountrySweden
CityGöteborg
Period17/09/0619/09/06

Keywords

  • LTCC
  • surface
  • lapping
  • polishing

Cite this

Tuominen, J., Kautio, K., Lahdes, M., Rönkä, K., Jaakola, T., & Lenkkeri, J. (2006). Surface planarisation of LTCC for high performance thin-film applications. In IMAPS Nordic Annual Conference (pp. 166-170). IMAPS Nordic.