Skip to main navigation Skip to search Skip to main content

Surface-Tension-Driven Self-Alignment of Microchips on Black-Silicon-Based Hybrid Template in Ambient Air

  • Ali Shah
  • , Bo Chang
  • , S Suihkonen
  • , Quan Zhou
  • , Harri Lipsanen
  • Aalto University

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)739-746
Number of pages8
JournalJournal of Microelectromechanical Systems
Volume22
Issue number3
DOIs
Publication statusPublished - 21 Feb 2013
MoE publication typeA1 Journal article-refereed

Keywords

  • Black silicon , fluoropolymer , hybrid template , self-alignment , self-assembly , solid edge , wetting contrast

Cite this