@article{636089fe74d74addaf9012d5e8d31706,
title = "Surface-Tension-Driven Self-Alignment of Microchips on Black-Silicon-Based Hybrid Template in Ambient Air",
keywords = "Black silicon , fluoropolymer , hybrid template , self-alignment , self-assembly , solid edge , wetting contrast",
author = "Ali Shah and Bo Chang and S Suihkonen and Quan Zhou and Harri Lipsanen",
note = "VK: T40102",
year = "2013",
month = feb,
day = "21",
doi = "10.1109/JMEMS.2013.2243109",
language = "English",
volume = "22",
pages = "739--746",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
number = "3",
}