Suspended metal wire array as a thermoacoustic sound source

Antti Niskanen, Juha Hassel (Corresponding Author), Miikka Tikander, Panu Maijala, Leif Grönberg, Panu Helistö

    Research output: Contribution to journalArticleScientificpeer-review

    63 Citations (Scopus)

    Abstract

    We demonstrate that a suspended metal wire array can be used to produce high-pressure sound waves over a wide spectrum using the thermoacoustic effect. We fabricated air-bridge arrays containing up to 2×105 wires covering an area of a few square centimeters. The supporting silicon wafer was isotropically plasma etched to release the wires thereby avoiding heat contact with the substrate. Sound pressure levels reaching 110 dB at a distance of 8 cm were demonstrated near 40 kHz in free field. The devices are also able to reproduce music and speech. They have potential for applications especially in the ultrasound range.
    Original languageEnglish
    Article number163102
    JournalApplied Physics Letters
    Volume95
    Issue number16
    DOIs
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

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