Suspended metal wire array as a thermoacoustic sound source

Antti Niskanen, Juha Hassel (Corresponding Author), Miikka Tikander, Panu Maijala, Leif Grönberg, Panu Helistö

Research output: Contribution to journalArticleScientificpeer-review

62 Citations (Scopus)

Abstract

We demonstrate that a suspended metal wire array can be used to produce high-pressure sound waves over a wide spectrum using the thermoacoustic effect. We fabricated air-bridge arrays containing up to 2×105 wires covering an area of a few square centimeters. The supporting silicon wafer was isotropically plasma etched to release the wires thereby avoiding heat contact with the substrate. Sound pressure levels reaching 110 dB at a distance of 8 cm were demonstrated near 40 kHz in free field. The devices are also able to reproduce music and speech. They have potential for applications especially in the ultrasound range.
Original languageEnglish
Article number163102
JournalApplied Physics Letters
Volume95
Issue number16
DOIs
Publication statusPublished - 2009
MoE publication typeA1 Journal article-refereed

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wire
acoustics
thermoacoustic effects
metals
music
sound pressure
sound waves
coverings
wafers
heat
air
silicon

Cite this

@article{4a0c6c33b5364383a3f6611196cdcc34,
title = "Suspended metal wire array as a thermoacoustic sound source",
abstract = "We demonstrate that a suspended metal wire array can be used to produce high-pressure sound waves over a wide spectrum using the thermoacoustic effect. We fabricated air-bridge arrays containing up to 2×105 wires covering an area of a few square centimeters. The supporting silicon wafer was isotropically plasma etched to release the wires thereby avoiding heat contact with the substrate. Sound pressure levels reaching 110 dB at a distance of 8 cm were demonstrated near 40 kHz in free field. The devices are also able to reproduce music and speech. They have potential for applications especially in the ultrasound range.",
author = "Antti Niskanen and Juha Hassel and Miikka Tikander and Panu Maijala and Leif Gr{\"o}nberg and Panu Helist{\"o}",
note = "Project code: 30356",
year = "2009",
doi = "10.1063/1.3249770",
language = "English",
volume = "95",
journal = "Applied Physics Letters",
issn = "0003-6951",
number = "16",

}

Suspended metal wire array as a thermoacoustic sound source. / Niskanen, Antti; Hassel, Juha (Corresponding Author); Tikander, Miikka; Maijala, Panu; Grönberg, Leif; Helistö, Panu.

In: Applied Physics Letters, Vol. 95, No. 16, 163102, 2009.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Suspended metal wire array as a thermoacoustic sound source

AU - Niskanen, Antti

AU - Hassel, Juha

AU - Tikander, Miikka

AU - Maijala, Panu

AU - Grönberg, Leif

AU - Helistö, Panu

N1 - Project code: 30356

PY - 2009

Y1 - 2009

N2 - We demonstrate that a suspended metal wire array can be used to produce high-pressure sound waves over a wide spectrum using the thermoacoustic effect. We fabricated air-bridge arrays containing up to 2×105 wires covering an area of a few square centimeters. The supporting silicon wafer was isotropically plasma etched to release the wires thereby avoiding heat contact with the substrate. Sound pressure levels reaching 110 dB at a distance of 8 cm were demonstrated near 40 kHz in free field. The devices are also able to reproduce music and speech. They have potential for applications especially in the ultrasound range.

AB - We demonstrate that a suspended metal wire array can be used to produce high-pressure sound waves over a wide spectrum using the thermoacoustic effect. We fabricated air-bridge arrays containing up to 2×105 wires covering an area of a few square centimeters. The supporting silicon wafer was isotropically plasma etched to release the wires thereby avoiding heat contact with the substrate. Sound pressure levels reaching 110 dB at a distance of 8 cm were demonstrated near 40 kHz in free field. The devices are also able to reproduce music and speech. They have potential for applications especially in the ultrasound range.

U2 - 10.1063/1.3249770

DO - 10.1063/1.3249770

M3 - Article

VL - 95

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 16

M1 - 163102

ER -