Suspended metal wire array as a thermoacoustic sound source

Antti Niskanen; Juha Hassel; Miikka Tikander; Panu Maijala; Leif Grönberg; Panu Helistö

doi:10.1063/1.3249770

Suspended metal wire array as a thermoacoustic sound source

Antti Niskanen
, Juha Hassel^*
, Miikka Tikander
, Panu Maijala
, Leif Grönberg
, Panu Helistö

^*Corresponding author for this work

Helsinki University of Technology

Research output: Contribution to journal › Article › Scientific › peer-review

91 Citations (Scopus)

Abstract

We demonstrate that a suspended metal wire array can be used to produce high-pressure sound waves over a wide spectrum using the thermoacoustic effect. We fabricated air-bridge arrays containing up to 2×10⁵ wires covering an area of a few square centimeters. The supporting silicon wafer was isotropically plasma etched to release the wires thereby avoiding heat contact with the substrate. Sound pressure levels reaching 110 dB at a distance of 8 cm were demonstrated near 40 kHz in free field. The devices are also able to reproduce music and speech. They have potential for applications especially in the ultrasound range.

Original language	English
Article number	163102
Journal	Applied Physics Letters
Volume	95
Issue number	16
DOIs	https://doi.org/10.1063/1.3249770
Publication status	Published - 2009
MoE publication type	A1 Journal article-refereed

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10.1063/1.3249770

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abstract = "We demonstrate that a suspended metal wire array can be used to produce high-pressure sound waves over a wide spectrum using the thermoacoustic effect. We fabricated air-bridge arrays containing up to 2×105 wires covering an area of a few square centimeters. The supporting silicon wafer was isotropically plasma etched to release the wires thereby avoiding heat contact with the substrate. Sound pressure levels reaching 110 dB at a distance of 8 cm were demonstrated near 40 kHz in free field. The devices are also able to reproduce music and speech. They have potential for applications especially in the ultrasound range.",

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AU - Grönberg, Leif

AU - Helistö, Panu

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AB - We demonstrate that a suspended metal wire array can be used to produce high-pressure sound waves over a wide spectrum using the thermoacoustic effect. We fabricated air-bridge arrays containing up to 2×105 wires covering an area of a few square centimeters. The supporting silicon wafer was isotropically plasma etched to release the wires thereby avoiding heat contact with the substrate. Sound pressure levels reaching 110 dB at a distance of 8 cm were demonstrated near 40 kHz in free field. The devices are also able to reproduce music and speech. They have potential for applications especially in the ultrasound range.

U2 - 10.1063/1.3249770

DO - 10.1063/1.3249770

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JO - Applied Physics Letters

JF - Applied Physics Letters

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Suspended metal wire array as a thermoacoustic sound source

Abstract

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