The invention relates to a system and a method for optical measurement of a target, wherein the target is illuminated, either actively illuminated, reflecting ambient light, or self illuminating, and a measurement radiation beam received from the target or through it is detected. The measurement system has optical fibres for guiding radiation from/to target positions. Radiation of several target positions is simultaneously filtered by a Fabry-Perot interferometer and detected by a row detector, for example.
Patent family as of 21.10.2021
US2014071451 AA 20140313 US20130024832 20130912
US9255844 BB 20160209 US20130024832 20130912
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|IPC||G01J 3/ 51 A I|
|Publication status||Published - 13 Mar 2014|
|MoE publication type||H1 Granted patent|